发明公开
- 专利标题: DIFFERENZDRUCKSENSOR
- 专利标题(英): Differential pressure sensor
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申请号: EP14796464.7申请日: 2014-11-03
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公开(公告)号: EP3077783A1公开(公告)日: 2016-10-12
- 发明人: JOCHEM, Bernhard , KOBER, Timo , LEMKE, Benjamin , RIEMER, Darina , TEIPEN, Rafael , THAM, Anh Tuan , WERTHSCHÜTZKY, Roland
- 申请人: Endress+Hauser GmbH+Co. KG
- 申请人地址: Hauptstrasse 1 79689 Maulburg DE
- 专利权人: Endress+Hauser GmbH+Co. KG
- 当前专利权人: Endress+Hauser GmbH+Co. KG
- 当前专利权人地址: Hauptstrasse 1 79689 Maulburg DE
- 代理机构: Andres, Angelika Maria
- 优先权: DE102013113594 20131206
- 国际公布: WO2015082145 20150611
- 主分类号: G01L13/02
- IPC分类号: G01L13/02 ; G01L19/06
摘要:
A differential pressure sensor (101) comprises a measuring diaphragm (110) made of an electrically conductive material; two electrically insulating mating bodies (120, 130); and at least one capacitive transducer, wherein the measuring diaphragm (110) is connected to the mating bodies (120, 130) in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge, wherein the mating bodies each have a diaphragm bed which is concave in the centre, wherein the mating bodies each have a pressure channel (125, 135) which extends through the mating body into the measuring chamber, wherein the capacitive transducer has at least one mating body electrode which is formed by a metal coating of the surface of the mating body in the region of the diaphragm bed (124, 134) and with which contact can be made by a metal coating of the wall of the pressure channel, wherein the mating body electrode is formed by an inner region (127, 137) of the metal coating, which inner region is annularly enclosed by an outer region (126, 136) of the coating and is separated from the latter by an annular insulation region (129, 139).
公开/授权文献
- EP3077783B1 DIFFERENZDRUCKSENSOR 公开/授权日:2019-06-19
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