发明公开

DIFFERENZDRUCKSENSOR
摘要:
A differential pressure sensor (101) comprises a measuring diaphragm (110) made of an electrically conductive material; two electrically insulating mating bodies (120, 130); and at least one capacitive transducer, wherein the measuring diaphragm (110) is connected to the mating bodies (120, 130) in a pressure-tight manner with the formation of a measuring chamber in each case along a circumferential edge, wherein the mating bodies each have a diaphragm bed which is concave in the centre, wherein the mating bodies each have a pressure channel (125, 135) which extends through the mating body into the measuring chamber, wherein the capacitive transducer has at least one mating body electrode which is formed by a metal coating of the surface of the mating body in the region of the diaphragm bed (124, 134) and with which contact can be made by a metal coating of the wall of the pressure channel, wherein the mating body electrode is formed by an inner region (127, 137) of the metal coating, which inner region is annularly enclosed by an outer region (126, 136) of the coating and is separated from the latter by an annular insulation region (129, 139).
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