- 专利标题: OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY
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申请号: EP14870402.6申请日: 2014-11-19
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公开(公告)号: EP3080617B1公开(公告)日: 2018-12-26
- 发明人: HUTCHISON, David N. , HECK, John
- 申请人: Intel Corporation
- 申请人地址: 2200 Mission College Boulevard Santa Clara, CA 95054 US
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: 2200 Mission College Boulevard Santa Clara, CA 95054 US
- 代理机构: Goddar, Heinz J.
- 优先权: US201314106172 20131213
- 国际公布: WO2015088726 20150618
- 主分类号: G01P3/68
- IPC分类号: G01P3/68 ; H01S3/10 ; B81B7/02 ; G01P15/093
摘要:
Embodiments of the present disclosure are directed towards a micro-electromechanical system (MEMS) sensing device, including a laser arrangement configured to generate a light beam, a first waveguide configured to receive and output a first portion of the light beam, and a second waveguide having a section that is evanescently coupled to the first waveguide and configured to receive and output a second portion of the light beam. The section of the second waveguide is configured to be movable substantially parallel to the first waveguide, wherein a movement of the section of the second waveguide may be caused by an inertial change applied to the sensing device. The movement of the section may cause a detectable change in light intensity between the first and second portions of the light beam. Based on the detected change, the inertial change may be determined. Other embodiments may be described and/or claimed.
公开/授权文献
- EP3080617A1 OPTOMECHANICAL SENSOR FOR ACCELEROMETRY AND GYROSCOPY 公开/授权日:2016-10-19
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