Invention Publication
EP3106833A2 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
审中-公开
传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
- Patent Title: INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
- Patent Title (中): 传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
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Application No.: EP16174422.2Application Date: 2016-06-14
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Publication No.: EP3106833A2Publication Date: 2016-12-21
- Inventor: Singer, Stefan , Gerster, Jochen , Herrmann, Stephan , Neff, Albrecht
- Applicant: NXP USA, Inc.
- Applicant Address: 6501 William Cannon Drive Austin TX 78735 US
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: 6501 William Cannon Drive Austin TX 78735 US
- Agency: Freescale law department - EMEA patent ops
- Priority: US201514742452 20150617
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01P1/00 ; G01C19/5733
Abstract:
A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
Public/Granted literature
- EP3106833A3 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION Public/Granted day:2017-05-03
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