发明公开
EP3106833A2 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION 审中-公开
传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG

INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
摘要:
A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
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