发明公开
EP3106833A2 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
审中-公开
传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
- 专利标题: INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
- 专利标题(中): 传感器麻省理工学院FÜRGLEICHTAKTUNTERDRÜCKUNG
-
申请号: EP16174422.2申请日: 2016-06-14
-
公开(公告)号: EP3106833A2公开(公告)日: 2016-12-21
- 发明人: Singer, Stefan , Gerster, Jochen , Herrmann, Stephan , Neff, Albrecht
- 申请人: NXP USA, Inc.
- 申请人地址: 6501 William Cannon Drive Austin TX 78735 US
- 专利权人: NXP USA, Inc.
- 当前专利权人: NXP USA, Inc.
- 当前专利权人地址: 6501 William Cannon Drive Austin TX 78735 US
- 代理机构: Freescale law department - EMEA patent ops
- 优先权: US201514742452 20150617
- 主分类号: G01C19/574
- IPC分类号: G01C19/574 ; G01P1/00 ; G01C19/5733
摘要:
A MEMS device includes a two spring systems coupling a pair of movable masses. Each of the spring systems includes a constrained stiff beam and a pair of flexures, where one flexure is directly coupled to one end of the stiff beam and to one of the movable masses and the other flexure is directly coupled to the opposing end of the stiff beam and to the other movable mass. In response to drive movement of the movable masses, the flexures enable pivotal movement the constrained stiff beams such that the stiff beams pivot in opposing directions about their center hinge points. This pivotal movement enables anti-phase linear oscillatory motion of the drive masses while substantially suppressing or otherwise rejecting in-phase motion of the movable masses.
公开/授权文献
- EP3106833A3 INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION 公开/授权日:2017-05-03
信息查询
IPC分类: