发明公开
- 专利标题： ALKOXIDE COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR PRODUCING THIN FILM, AND ALCOHOL COMPOUND
- 专利标题（中）： 醇，原料薄膜教育，方法生产薄膜和酗酒有关
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申请号： EP15782391.5申请日： 2015-03-30
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公开(公告)号： EP3135664A1公开(公告)日： 2017-03-01
- 发明人: SAKURAI, Atsushi , HATASE, Masako , YOSHINO, Tomoharu , ENZU, Masaki
- 申请人： Adeka Corporation
- 申请人地址： 2-35, Higashiogu 7-chome Arakawa-ku Tokyo 116-8554 JP
- 专利权人： Adeka Corporation
- 当前专利权人： Adeka Corporation
- 当前专利权人地址： 2-35, Higashiogu 7-chome Arakawa-ku Tokyo 116-8554 JP
- 代理机构： Kador & Partner
- 优先权： JP2014087310 20140421
- 国际公布： WO2015163090 20151029
- 主分类号： C07C251/08
- IPC分类号： C07C251/08 ; C23C16/18 ; H01L21/28 ; H01L21/285 ; C07F15/06
摘要：
An alkoxide compound is represented by General Formula (I) below:
wherein R 1 to R 3 each independently represent hydrogen, a C 1-12 hydrocarbon group, etc.; R 4 represents a C 1-12 hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C 1-12 hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n + m represents the valence of the metal atom or silicon atom.
wherein R 1 to R 3 each independently represent hydrogen, a C 1-12 hydrocarbon group, etc.; R 4 represents a C 1-12 hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C 1-12 hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n + m represents the valence of the metal atom or silicon atom.
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