发明公开
- 专利标题: RADIATION-DETECTING STRUCTURES AND FABRICATION METHODS THEREOF
- 专利标题(中): 哈佛大学医学学士学位
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申请号: EP15847783.6申请日: 2015-06-22
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公开(公告)号: EP3158365A2公开(公告)日: 2017-04-26
- 发明人: DAHAL, Rajendra P. , BHAT, Ishwara B. , DANON, Yaron , LU, James Jian-Qiang
- 申请人: Rensselaer Polytechnic Institute
- 申请人地址: 110 8th Street Troy, NY 12180 US
- 专利权人: Rensselaer Polytechnic Institute
- 当前专利权人: Rensselaer Polytechnic Institute
- 当前专利权人地址: 110 8th Street Troy, NY 12180 US
- 代理机构: Friese Goeden Patentanwälte PartGmbB
- 优先权: US201462015605P 20140623
- 国际公布: WO2016053414 20160407
- 主分类号: G01T3/08
- IPC分类号: G01T3/08 ; H01L27/14 ; H01L31/115 ; H01L31/18
摘要:
Radiation detecting-structures and fabrications methods thereof are presented. The methods include, for instance: providing a substrate, the substrate including at least one trench extending into the substrate from an upper surface thereof; and epitaxially forming a radiation-responsive semiconductor material layer from one or more sidewalls of the at least one trench of the substrate, the radiation-responsive semiconductor material layer responding to incident radiation by generating charge carriers therein. In one embodiment, the sidewalls of the at least one trench of the substrate include a (111) surface of the substrate, which facilitates epitaxially forming the radiation-responsive semiconductor material layer. In another embodiment, the radiation-responsive semiconductor material layer includes hexagonal boron nitride, and the epitaxially forming includes providing the hexagonal boron nitride with an a-axis aligned parallel to the sidewalls of the trench.
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