发明公开
- 专利标题: MULTI-VANE THROTTLE VALVE
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申请号: EP14899842申请日: 2014-08-14
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公开(公告)号: EP3180552A4公开(公告)日: 2018-04-11
- 发明人: SIN PHENG
- 申请人: FERROTEC USA CORP
- 专利权人: FERROTEC USA CORP
- 当前专利权人: FERROTEC USA CORP
- 优先权: US2014050986 2014-08-14
- 主分类号: F16K27/12
- IPC分类号: F16K27/12 ; F16K1/22 ; F16K49/00 ; F16K51/02 ; H01J37/18
摘要:
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.
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