公开(公告)号：EP2734758A4

公开(公告)日：2015-03-25

申请号：EP12814127

申请日：2012-07-18

申请人： FERROTEC USA CORP

发明人： SIN PHENG

IPC分类号： F16K51/02 ,  F16K1/22 ,  F16K49/00

CPC分类号： F16K51/02 ,  F16K1/222 ,  F16K1/223 ,  F16K49/007 ,  Y10T137/0318 ,  Y10T137/6416 ,  Y10T137/6579 ,  Y10T137/86936 ,  Y10T137/87475

公开(公告)号：EP1749116A4

公开(公告)日：2011-09-21

申请号：EP05749791

申请日：2005-05-13

申请人： FERROTEC USA CORP

发明人： SAJJAD BASHA S ,  SIN PHENG ,  SENGUPTA SUBHASHISH ,  EREZ SHMUEL ,  KRONEBERGER CRIS KEITH

IPC分类号： C23C16/00 ,  C23C14/56 ,  C23F1/00 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687

CPC分类号： H01L21/6719 ,  C23C14/566 ,  H01L21/67201 ,  H01L21/67706 ,  H01L21/67709 ,  H01L21/67754 ,  H01L21/68764 ,  H01L21/68771

公开(公告)号：EP3195710A4

公开(公告)日：2018-06-06

申请号：EP14902266

申请日：2014-09-18

申请人： FERROTEC USA CORP

发明人： OTEY ROBERT ,  KAMINSKI DAVID A ,  SIN PHENG

IPC分类号： H01L35/30 ,  F28D1/02

CPC分类号： F25B21/02 ,  F28D1/024 ,  F28F5/00 ,  H01L35/30

摘要： A fluid heat exchanger has an impeller assembly with first and second impeller bodies mated together, each having a substantially circular shape and at least one opening therethrough. Impeller vanes extend axially from the first impeller body and away from the second impeller body. Impeller vanes extend axially from the second impeller body away from the first impeller body. A thermoelectric module is disposed between the first impeller body and the second impeller body. Heat sinks are connected to each side of the thermoelectric module and extend through at least one opening in the first and second impeller bodies, where the impeller vanes are configured to move a fluid through the heat sinks during rotation of the first and second impeller bodies. Electrically-conductive windings disposed in the impeller assembly are configured to deliver induced electric current to the thermoelectric module(s).

公开(公告)号：EP3180552A4

公开(公告)日：2018-04-11

申请号：EP14899842

申请日：2014-08-14

申请人： FERROTEC USA CORP

发明人： SIN PHENG

IPC分类号： F16K27/12 ,  F16K1/22 ,  F16K49/00 ,  F16K51/02 ,  H01J37/18

CPC分类号： F16K1/223 ,  F16K1/222 ,  F16K49/007 ,  F16K51/02 ,  H01J37/18 ,  H01J2237/186 ,  H01J2237/3132

摘要： A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.