发明公开
- 专利标题: SEMICONDUCTOR DEVICE WITH INTEGRATED MAGNETIC TUNNEL JUNCTION
- 专利标题(中): 具有集成磁隧道结的半导体器件
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申请号: EP15201487.4申请日: 2015-12-21
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公开(公告)号: EP3185321A1公开(公告)日: 2017-06-28
- 发明人: KAR, Gouri Sankar , BÖMMELS, Jürgen , CROTTI, Davide
- 申请人: IMEC VZW
- 申请人地址: Kapeldreef 75 3001 Leuven BE
- 专利权人: IMEC VZW
- 当前专利权人: IMEC VZW
- 当前专利权人地址: Kapeldreef 75 3001 Leuven BE
- 代理机构: Awapatent AB
- 主分类号: H01L43/08
- IPC分类号: H01L43/08 ; G11C11/15 ; G11C11/16
摘要:
A semiconductor device (100) is disclosed, comprising stack of a first metal layer (110), a first dielectric layer (120), a second metal layer (130),a second dielectric layer (140), and a third metal layer (150). Further, a magnetic tunnel junction, MTJ, device (160) is arranged in the first dielectric layer and the second metal layer and electrically connected to the first metal layer and the third metal layer. A method for manufacturing such as semiconductor device is also disclosed.
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