发明公开
- 专利标题: TEMPORARY STORAGE SYSTEM, CONVEYANCE SYSTEM USING SAME, AND TEMPORARY STORAGE METHOD
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申请号: EP15840768申请日: 2015-07-23
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公开(公告)号: EP3192751A4公开(公告)日: 2018-05-02
- 发明人: FUKUSHIMA MASAZUMI
- 申请人: MURATA MACHINERY LTD
- 专利权人: MURATA MACHINERY LTD
- 当前专利权人: MURATA MACHINERY LTD
- 优先权: JP2014184667 2014-09-10
- 主分类号: B65G1/04
- IPC分类号: B65G1/04 ; H01L21/677
摘要:
A temporary storage system having a large capacity and loading and unloading articles promptly is provided. The temporary storage system has a grid-like travelling rail and buffers over processing equipment except for an area over a load port, and local vehicles travel along the rail. The carriage of the local vehicles is provided with at least a longitudinal travelling unit, at least a lateral travelling unit, and at least an advancement and retraction mechanism selectively advancing one of the longitudinal travelling unit and the lateral travelling unit to a position supported by the travelling rail, and travels along the travelling rail longitudinally and laterally, and the transfer unit of the local vehicles is provided with a hoist and an arm moving the hoist horizontally. The local vehicles stop at a position corresponding to the load port, advances the arm towards the load port, and transfers an article between the load port.
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IPC分类: