发明公开
EP3193378A1 NITRIDE SEMICONDUCTOR DEVICE AND QUANTUM CASCADE LASER USING THE SAME
审中-公开
氮化物半导体器件和量子级联激光器
- 专利标题: NITRIDE SEMICONDUCTOR DEVICE AND QUANTUM CASCADE LASER USING THE SAME
- 专利标题(中): 氮化物半导体器件和量子级联激光器
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申请号: EP16199936.2申请日: 2016-11-22
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公开(公告)号: EP3193378A1公开(公告)日: 2017-07-19
- 发明人: KOTANI, Teruhisa , ARAKAWA, Yasuhiko
- 申请人: Sharp Kabushiki Kaisha , The University of Tokyo
- 申请人地址: 1 Takumi-cho Sakai-ku Sakai-shi Osaka 590-8522 JP
- 专利权人: Sharp Kabushiki Kaisha,The University of Tokyo
- 当前专利权人: Sharp Kabushiki Kaisha,The University of Tokyo
- 当前专利权人地址: 1 Takumi-cho Sakai-ku Sakai-shi Osaka 590-8522 JP
- 代理机构: Müller Hoffmann & Partner
- 优先权: JP2016004333 20160113
- 主分类号: H01L33/16
- IPC分类号: H01L33/16 ; H01L33/32 ; H01S5/323
摘要:
A nitride semiconductor device includes a GaN substrate (11) in which an angle between a principal surface and an m-plane of GaN is -5° or more and +5° or less, a first intermediate layer (101) disposed on the principal surface of the substrate (11) and made of Al z Ga (1-z) N (0 ≤ z ≤ 1), and a second intermediate layer (102) disposed on a principal surface of the first intermediate layer (101), having an Al content different from that of the first intermediate layer (101), and made of Al x1 In y1 Ga (1-x1-y1) (0 ≤ x1 ≤ 1, 0 ≤ y1 ≤ 1). A quantum cascade laser (10) includes the nitride semiconductor device.
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