- 专利标题: AQUEOUS INDIUM OR INDIUM ALLOY PLATING BATH AND PROCESS FOR DEPOSITION OF INDIUM OR AN INDIUM ALLOY
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申请号: EP16153379.9申请日: 2016-01-29
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公开(公告)号: EP3199666B1公开(公告)日: 2018-09-26
- 发明人: Sperling, Jan , Pieper, Stefan , Vazhenin, Grigory , Castellani, Mauro , Kirbs, Andreas , Rohde, Dirk
- 申请人: Atotech Deutschland GmbH
- 申请人地址: Erasmusstraße 20 10553 Berlin DE
- 专利权人: Atotech Deutschland GmbH
- 当前专利权人: Atotech Deutschland GmbH
- 当前专利权人地址: Erasmusstraße 20 10553 Berlin DE
- 主分类号: C25D3/54
- IPC分类号: C25D3/54 ; C25D3/56 ; C25D5/10 ; C25D5/18 ; C25D5/48 ; C25D5/40
摘要:
An aqueous indium or indium alloy plating bath comprising - a source of indium ions, - an acid, - a source of halide ions, - a surfactant according to formula (I) wherein A is selected from branched or unbranched C 10 -C 15 -alkyl; B is selected from the group consisting of hydrogen and alkyl; m is an integer ranging from 5 to 25; each R is independently from each other selected from hydrogen and methyl; and - a dihydroxybenzene derivative of formula (II) wherein each X is independently selected from fluorine, chlorine, bromine, iodine, alkoxy, and nitro; n is an integer ranging from 1 to 4, and a process for deposition of indium or an indium alloy wherein said bath is used.
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