发明公开
EP3207636A1 CESIUM PRIMARY ION SOURCE FOR SECONDARY ION MASS SPECTROMETER 审中-公开
用于二级离子质谱仪的铯原子离子源

CESIUM PRIMARY ION SOURCE FOR SECONDARY ION MASS SPECTROMETER
摘要:
A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface may promote sealing of a source material cavity.
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