公开(公告)号：EP3207636A1

公开(公告)日：2017-08-23

申请号：EP15851131.1

申请日：2015-10-13

申请人： Arizona Board of Regents, a Body Corporate of the State of Arizona acting for and on behalf of Arizona State University

发明人： WILLIAMS, Peter ,  WILLIAMS, Karen, Amanda ,  BOSE, Maitrayee ,  PRINCE, John

IPC分类号： H03L7/26 ,  H01S1/00 ,  G04F5/14 ,  H05H3/00 ,  H05H3/02

CPC分类号： H01J27/022 ,  H01H3/02 ,  H01J27/22 ,  H01J49/0004 ,  H01J49/26 ,  H03L7/26

摘要： A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface may promote sealing of a source material cavity.

摘要翻译： 与二次离子质谱仪一起使用的一次离子源子组件可以包括一体式石墨电离器管和储存器基座。 主离子源可以包括限定离子发生器孔的毛细管插入件。 离子发生器孔可以居中地设置在向外突出的圆锥形或截头圆锥形表面中，并且可以用难熔金属涂层或护套覆盖。 可以操纵包括电离器表面形状，电离器材料，电离器温度和电子束挡板孔口几何形状的参数以消除幻像。 具有双锥形表面的石墨管垫圈可以促进源材料腔体的密封。