发明公开
- 专利标题: CESIUM PRIMARY ION SOURCE FOR SECONDARY ION MASS SPECTROMETER
- 专利标题(中): 用于二级离子质谱仪的铯原子离子源
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申请号: EP15851131.1申请日: 2015-10-13
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公开(公告)号: EP3207636A1公开(公告)日: 2017-08-23
- 发明人: WILLIAMS, Peter , WILLIAMS, Karen, Amanda , BOSE, Maitrayee , PRINCE, John
- 申请人: Arizona Board of Regents, a Body Corporate of the State of Arizona acting for and on behalf of Arizona State University
- 申请人地址: 1475 North Scottsdale Road Sky Song Suite 200 Scottsdale, US 85257 US
- 专利权人: Arizona Board of Regents, a Body Corporate of the State of Arizona acting for and on behalf of Arizona State University
- 当前专利权人: Arizona Board of Regents, a Body Corporate of the State of Arizona acting for and on behalf of Arizona State University
- 当前专利权人地址: 1475 North Scottsdale Road Sky Song Suite 200 Scottsdale, US 85257 US
- 代理机构: Isarpatent
- 优先权: US201462063023P 20141013
- 国际公布: WO2016061057 20160421
- 主分类号: H03L7/26
- IPC分类号: H03L7/26 ; H01S1/00 ; G04F5/14 ; H05H3/00 ; H05H3/02
摘要:
A primary ion source subassembly for use with a secondary ion mass spectrometer may include a unitary graphite ionizer tube and reservoir base. A primary ion source may include a capillary insert defining an ionizer aperture. An ionizer aperture may be centrally arranged in an outwardly protruding conical or frustoconical surface, and may be overlaid with a refractory metal coating or sheath. Parameters including ionizer surface shape, ionizer materials, ionizer temperature, and beam stop plate orifice geometry may be manipulated to eliminate ghost images. A graphite tube gasket with a dual tapered surface may promote sealing of a source material cavity.
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