发明公开
EP3219833A1 DEVICE FOR MANUFACTURING GROUP-III NITRIDE SINGLE CRYSTAL, METHOD FOR MANUFACTURING GROUP-III NITRIDE SINGLE CRYSTAL USING SAME, AND ALUMINUM NITRIDE SINGLE CRYSTAL
有权
制造III族氮化物单晶的装置,使用该装置制造III族氮化物单晶的方法和氮化铝单晶
- 专利标题: DEVICE FOR MANUFACTURING GROUP-III NITRIDE SINGLE CRYSTAL, METHOD FOR MANUFACTURING GROUP-III NITRIDE SINGLE CRYSTAL USING SAME, AND ALUMINUM NITRIDE SINGLE CRYSTAL
- 专利标题(中): 制造III族氮化物单晶的装置,使用该装置制造III族氮化物单晶的方法和氮化铝单晶
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申请号: EP15858289.0申请日: 2015-11-09
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公开(公告)号: EP3219833A1公开(公告)日: 2017-09-20
- 发明人: NAGASHIMA, Toru , FUKUDA, Masayuki
- 申请人: Tokuyama Corporation
- 申请人地址: 1-1 Mikage-cho Shunan-shi, Yamaguchi-ken 745-8648 JP
- 专利权人: Tokuyama Corporation
- 当前专利权人: Tokuyama Corporation
- 当前专利权人地址: 1-1 Mikage-cho Shunan-shi, Yamaguchi-ken 745-8648 JP
- 代理机构: Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte
- 优先权: JP2014228482 20141110; JP2015101281 20150518
- 国际公布: WO2016076270 20160519
- 主分类号: C30B29/38
- IPC分类号: C30B29/38 ; C23C16/34 ; C23C16/455 ; C30B25/14 ; H01L21/205
摘要:
An apparatus for manufacturing a group III nitride single crystal including: a reaction vessel including a reaction area, wherein in the reaction area, a group III source gas and a nitrogen source gas are reacted such that a group III nitride crystal is grown on a substrate; a susceptor arranged in the reaction area and supporting the substrate; a group III source gas supply nozzle supplying the group III source gas to the reaction area; and a nitrogen source gas supply nozzle supplying the nitrogen source gas to the reaction area, wherein the nitrogen source gas supply nozzle is configured to supply the nitrogen source gas and at least one halogen-based gas selected from the group consisting of a hydrogen halide gas and a halogen gas to the reaction area.
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