- 专利标题: OPTICAL GAS CONCENTRATION MEASUREMENT METHOD, AND METHOD FOR MONITORING GAS CONCENTRATION BY SUCH METHOD
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申请号: EP15860939申请日: 2015-11-20
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公开(公告)号: EP3222995A4公开(公告)日: 2018-06-06
- 发明人: NAGASE MASAAKI , NISHINO KOUJI , IKEDA NOBUKAZU , YAMAJI MICHIO , SUGAWA SHIGETOSHI , KURODA RIHITO
- 申请人: FUJIKIN KK , UNIV TOHOKU
- 专利权人: FUJIKIN KK,UNIV TOHOKU
- 当前专利权人: FUJIKIN KK,UNIV TOHOKU
- 优先权: JP2014237220 2014-11-23
- 主分类号: G01N21/31
- IPC分类号: G01N21/31 ; C23C16/18 ; C23C16/52 ; G01N33/00 ; H01L21/205
摘要:
To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. [Solution] In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.
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