公开(公告)号：EP3222995A4

公开(公告)日：2018-06-06

申请号：EP15860939

申请日：2015-11-20

申请人： FUJIKIN KK ,  UNIV TOHOKU

发明人： NAGASE MASAAKI ,  NISHINO KOUJI ,  IKEDA NOBUKAZU ,  YAMAJI MICHIO ,  SUGAWA SHIGETOSHI ,  KURODA RIHITO

IPC分类号： G01N21/31 ,  C23C16/18 ,  C23C16/52 ,  G01N33/00 ,  H01L21/205

CPC分类号： G01N21/27 ,  C23C16/18 ,  C23C16/52 ,  G01N21/314 ,  G01N21/3151 ,  G01N21/33 ,  G01N33/0027 ,  G01N2021/3155 ,  G01N2021/3159 ,  G01N2021/3181 ,  G01N2201/0627 ,  G01N2201/0696 ,  G01N2201/12 ,  H01L21/205

摘要： To provide a concentration measurement method with which the concentrations of predetermined chemical components can be measured non-destructively, accurately, and rapidly by a simple means, up to the concentrations in trace amount ranges, as well as a concentration measurement method with which the concentrations of chemical components in a measurement target can be accurately and rapidly measured in real time up to the concentrations in nano-order trace amount ranges, and which is endowed with a versatility that can be realized in a variety of embodiments and modes. [Solution] In the present invention, a measurement target is irradiated, in a time sharing manner, with light of a first wavelength and light of a second wavelength that have different optical absorption rates with respect to the measurement target. The light of each wavelength, arriving optically via the measurement target as a result of irradiation with the light of each wavelength, is received at a shared light-receiving sensor. A differential signal is formed, the differential signal being of a signal pertaining to the light of the first wavelength and a signal pertaining to the light of the second wavelength, the signals outputted from the light-receiving sensor upon receipt of the light. The concentration of a chemical component in the measurement target is derived on the basis of the differential signal.

公开(公告)号：EP1574924A4

公开(公告)日：2006-07-26

申请号：EP03780914

申请日：2003-12-18

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  IKEDA NOBUKAZU ,  NISHIMO KOUJI ,  NAGASE MASAAKI ,  DOHI RYOUSUKE ,  NISHIMURA RYUTARO

IPC分类号： F16K47/02 ,  F16L55/04 ,  G05D16/02

CPC分类号： F16K47/02 ,  F16K47/023 ,  F16L55/043 ,  Y10T137/0324 ,  Y10T137/0379 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/86461

摘要： A fluid passage is emergency-closed in a short time without causing water hammer by extremely simple device or operation. A water hammerless closing device comprises an actuator-operated valve provided in the fluid passage and an electro-pneumatic converter for supplying a two-step actuator working pressure Pa to the actuator-operated valve, a vibration sensor secured removably to the upstream-side pipe-line of the actuator-operated action valve, and a tuning box receiving a vibration detection signal Pr from the vibration sensor and delivering a control signal Sc for controlling the magnitude of the step working pressure Ps' of the two-step actuator working pressure Pa to the electro-pneumatic converter, and regulating the control signal Sc to deliver the two-step actuator working pressure Pa of the step working pressure Ps' for bringing the vibration detection signal Pr substantially to zero from the electro-pneumatic converter.

公开(公告)号：EP1585002A4

公开(公告)日：2006-04-26

申请号：EP04702837

申请日：2004-01-16

申请人： FUJIKIN KK ,  OHMI TADAHIRO ,  TOKYO ELECTRON LTD

发明人： OHMI TADAHIRO ,  SUGIYAMA KAZUHIKO ,  MIZUSAWA KENETU ,  TAKAHASHI EIJI ,  UNO TOMIO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  IKEDA NOBUKAZU ,  NAGASE MASAAKI

IPC分类号： G05D7/06 ,  H01L21/00 ,  H01L21/306

CPC分类号： H01L21/67023 ,  G05D7/0635 ,  Y10T137/6416 ,  Y10T137/6606 ,  Y10T137/7761

摘要： A pressure-type flow control device is used to permit a high-accuracy control of the flow rate of a clustering fluid such as HF gas to be supplied to a vacuum chamber or the like within a flow rate range of about 3-300 SCCM. Specifically, a method of controlling the flow rate of a clustering fluid that uses a pressure-type flow control device where a flow rate Q of a gas flowing through an orifice is computed as Q=KP1 (K is constant) with a ratio P2/P1 between an orifice-upstream-side gas pressure P1 and a downstream-side gas pressure P2 kept up to the critical pressure ratio of the gas, wherein the pressure-type flow control device is heated to at least 40°C, or the clustering fluid is added with a dilute gas to be kept at up to a partial pressure, thereby allowing the clustering fluid, produced by dissociating the association of molecules and then keeping them in a monomolecular state, to flow through the orifice.

摘要翻译： 使用压力式流量控制装置，可以在3×300SCCM的流量范围内对供应到真空室等的HF气体等聚集流体进行高精度流量控制。 具体地说，本文公开了使用压力型流量控制装置来控制聚集流体的流量的方法，其中通过孔口的气体的流量Q被计算为K = KP1（其中K 是常数），气体处于孔口上游侧的气体压力P1与孔口下游侧的气体压力P2之间的比P2 / P1保持在不高于 通过将上述压力式流量控制装置加热至高于40℃的温度，或者通过将稀释气体施加到聚集流体以使其低于 分压使得聚簇流体被允许以单分子状态通过上述孔口。

公开(公告)号：EP1672457A4

公开(公告)日：2008-02-13

申请号：EP04817112

申请日：2004-09-14

申请人： FUJIKIN KK ,  OHMI TADAHIRO

发明人： OHMI TADAHIRO ,  TERAMOTO AKINOBU ,  UNO TOMIO ,  DOHI RYOUSUKE ,  NISHINO KOUJI ,  NAKAMURA OSAMU ,  MATSUMOTO ATSUSHI ,  NAGASE MASAAKI ,  IKEDA NOBUKAZU

IPC分类号： G05D7/06 ,  G05D16/20

CPC分类号： G05D16/208 ,  Y10T137/7761 ,  Y10T137/8741 ,  Y10T137/87507

摘要： Flow rate control accuracy is prevented from being reduced in a low flow rate region to enable highly accurate flow rate control over the entire flow rate control region. By this, a chamber inner pressure is highly accurately controlled over a wide range by regulating the flow rate of a gas fed to a chamber. A gas feeding device for feeding a gas to a chamber, where the device is constituted of parallelly connected pressure-type flow rate control devices and a control device for controlling the flow rate control devices and feeds a desired gas, while controlling the flow rate, to a chamber deaerated by a vacuum pump. The gas feeding device is constructed such that one of the pressure-type flow control devices controls a gas flow rate range of up to 10% maximum of the maximum flow rate fed to the chamber and the remaining flow control devices control the remaining range. Further, a pressure detector is installed on a chamber and a detected value from the detector is inputted in the control device. Control signals to the pressure-type flow rate control devices are regulated to control the amount of the gas fed to the chamber, controlling a chamber inner pressure.

公开(公告)号：EP1918799A4

公开(公告)日：2009-05-06

申请号：EP06746185

申请日：2006-05-10

申请人： FUJIKIN KK ,  NAT UNIVERSITY CORP TOHOKU UNV

发明人： OHMI TADAHIRO ,  NISHINO KOUJI ,  DOHI RYOUSUKE ,  IKEDA NOBUKAZU ,  NAGASE MASAAKI ,  HIRATA KAORU ,  SUGITA KATSUYUKI ,  SHINOHARA TSUTOMU ,  HIROSE TAKASHI ,  IMAI TOMOKAZU ,  YOSHIDA TOSHIHIDE ,  TANAKA HISASHI

IPC分类号： G05D7/06 ,  F16K27/00 ,  F16L55/00 ,  G01F1/42

CPC分类号： F16K27/003 ,  F16L55/02718 ,  G01F1/36 ,  G01F15/001 ,  G01F15/005 ,  G05D7/0635

摘要： An orifice changeable pressure type flow controller capable of easily changing a control flow by easily changing an orifice without disassembling and assembling the flow controller. In the flow controller (A), the valve body (23) of a control valve (2) is disposed between an inlet side mounting block (39) having a connection part for a fluid feed pipe and an outlet side mounting block (43) having a connection part for a fluid takeout pipe, and the fluid inlet side of the valve body (23) is releasably connected airtight to the inlet side mounting block (39) and the fluid outlet side of the valve body (23) is releasably connected airtight to the outlet side mounting block (43) to form a flow passage allowing gases to flow therein through the control valve (2). The gasket type orifice (38) of the flow controller (A) is detachably inserted between a gasket type orifice insertion hole (42c) formed on the outlet side of the valve body (23) and a gasket type orifice insertion hole (43b) in the outlet side mounting block (43).