发明公开
- 专利标题: MEMORY CELL AND NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE
- 专利标题(中): 存储器单元和非易失性半导体存储器件
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申请号: EP15851362.2申请日: 2015-10-06
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公开(公告)号: EP3232465A1公开(公告)日: 2017-10-18
- 发明人: SHINAGAWA Yutaka , TANIGUCHI Yasuhiro , KASAI Hideo , SAKURAI Ryotaro , KAWASHIMA Yasuhiko , TOYA Tatsuro , OKUYAMA Kosuke
- 申请人: Floadia Corporation
- 申请人地址: 30-9, OGawahigashicho 1-chome Kodaira-shi Tokyo 187-0031 JP
- 专利权人: Floadia Corporation
- 当前专利权人: Floadia Corporation
- 当前专利权人地址: 30-9, OGawahigashicho 1-chome Kodaira-shi Tokyo 187-0031 JP
- 代理机构: Bandpay & Greuter
- 优先权: JP2014211095 20141015
- 国际公布: WO2016060011 20160421
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; G11C16/02 ; G11C16/04 ; H01L27/115 ; H01L29/788 ; H01L29/792
摘要:
A voltage applied to a bit line (BL1) or a voltage applied to a source line (SL) is reduced to a value that allows a first select gate structure (5) or a second select gate structure (6) to block electrical connection between the bit line (BL1) and a channel layer (CH) or between the source line (SL) and the channel layer (CH), irrespective of a charge storage gate voltage needed to inject charge into a charge storage layer (EC) by a quantum tunneling effect. In accordance with the reduction in voltage(s) applied to the bit line (BL1) and the source line (SL), thickness of a first select gate insulating film (30) of the first select gate structure (5) and thickness of a second select gate insulating film (33) of the second select gate structure (6) are reduced. High-speed operation is achieved correspondingly. In accordance with the reduction in voltage(s) applied to the bit line (BL1) and the source line (SL), thickness of a gate insulating film of a field effect transistor in a peripheral circuit that controls a memory cell is reduced. The area of the peripheral circuit is reduced correspondingly.
公开/授权文献
- EP3232465B1 MEMORY CELL AND NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE 公开/授权日:2024-05-08
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