发明公开
- 专利标题: DECOUPLED VIA FILL
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申请号: EP14909243申请日: 2014-12-23
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公开(公告)号: EP3238235A4公开(公告)日: 2018-07-25
- 发明人: SHUSTERMAN YURIY V , GRIGGIO FLAVIO , INDUKURI TEJASWI K , BRAIN RUTH A
- 申请人: INTEL CORP
- 专利权人: INTEL CORP
- 当前专利权人: INTEL CORP
- 优先权: US2014072249 2014-12-23
- 主分类号: H01L21/3205
- IPC分类号: H01L21/3205 ; H01L21/203 ; H01L21/28 ; H01L21/321 ; H01L21/3213 ; H01L21/768 ; H01L23/31 ; H01L23/528 ; H01L23/532
摘要:
Techniques are disclosed for providing a decoupled via fill. Given a via trench, a first barrier layer is conformally deposited onto the bottom and sidewalls of the trench. A first metal fill is blanket deposited into the trench. The non-selective deposition is subsequently recessed so that only a portion of the trench is filled with the first metal. The previously deposited first barrier layer is removed along with the first metal, thereby re-exposing the upper sidewalls of the trench. A second barrier layer is conformally deposited onto the top of the first metal and the now re-exposed trench sidewalls. A second metal fill is blanket deposited into the remaining trench. Planarization and/or etching can be carried out as needed for subsequent processing. Thus, a methodology for filling high aspect ratio vias using a dual metal process is provided. Note, however, the first and second fill metals may be the same.
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