发明公开
EP3243219A1 SPLIT GATE NON-VOLATILE FLASH MEMORY CELL HAVING METAL-ENHANCED GATES AND METHOD OF MAKING SAME
审中-公开
具有金属增强门的分裂门非易失性闪存单元及其制造方法
- 专利标题: SPLIT GATE NON-VOLATILE FLASH MEMORY CELL HAVING METAL-ENHANCED GATES AND METHOD OF MAKING SAME
- 专利标题(中): 具有金属增强门的分裂门非易失性闪存单元及其制造方法
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申请号: EP15798284.4申请日: 2015-11-06
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公开(公告)号: EP3243219A1公开(公告)日: 2017-11-15
- 发明人: CHEN, Chun-Ming , WU, Man-Tang , YANG, Jeng-Wei , SU, Chien-Sheng
- 申请人: Silicon Storage Technology Inc.
- 申请人地址: 450 Holger Way San Jose, CA 95134 US
- 专利权人: Silicon Storage Technology Inc.
- 当前专利权人: Silicon Storage Technology Inc.
- 当前专利权人地址: 450 Holger Way San Jose, CA 95134 US
- 代理机构: Betten & Resch
- 优先权: US201514589656 20150105
- 国际公布: WO2016111742 20160714
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L27/115 ; H01L29/66 ; H01L29/788 ; G11C16/04
摘要:
A non-volatile memory cell including a substrate having first and second regions with a channel region therebetween. A floating gate is disposed over and insulated from a first portion of the channel region which is adjacent the first region. A select gate is disposed over and insulated from a second portion of the channel region which is adjacent to the second region. The select gate includes a block of polysilicon material and a work function metal material layer extending along bottom and side surfaces of the polysilicon material block. The select gate is insulated from the second portion of the channel region by a silicon dioxide layer and a high K insulating material layer. A control gate is disposed over and insulated from the floating gate, and an erase gate is disposed over and insulated from the first region, and disposed laterally adjacent to and insulated from the floating gate.
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