发明公开
EP3259228A1 MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES
审中-公开
具有高度/选择性控制的光学表面的微型光学平台装置
- 专利标题： MICRO-OPTICAL BENCH DEVICE WITH HIGHLY/SELECTIVELY-CONTROLLED OPTICAL SURFACES
- 专利标题（中）： 具有高度/选择性控制的光学表面的微型光学平台装置
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申请号： EP16711920.5申请日： 2016-02-19
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公开(公告)号： EP3259228A1公开(公告)日： 2017-12-27
- 发明人: SAADANY, Bassam, A. , SABRY, Yasser, M. , MEDHAT, Mostafa , MORTADA, Bassem , NAGI, Muhammed , SADEK, Mohamed , NADA, Yasseen , HASSAN, Khaled
- 申请人： SI-Ware Systems
- 申请人地址： 555 California Street San Francisco, CA 94104 US
- 专利权人： SI-Ware Systems
- 当前专利权人： SI-Ware Systems
- 当前专利权人地址： 555 California Street San Francisco, CA 94104 US
- 代理机构： Cabinet Laurent & Charras
- 优先权： US201562119073P 20150220; US201615047205 20160218
- 国际公布： WO2016134334 20160825
- 主分类号： B81C1/00
- IPC分类号： B81C1/00 ; G01B9/02 ; G01J3/02 ; G01J3/453
摘要：
A micro-optical bench device is fabricated by a process that provides control over one or more properties of the micro-optical bench device and/or one or more properties of optical surfaces in the micro-optical bench device. The process includes etching a substrate to form a permanent structure including optical elements and a temporary structure. The shape of the temporary structure and gaps between the temporary structure and permanent structure facilitate control of a property of the micro-optical bench and/or optical surfaces therein. The process further includes removing the temporary structure from an optical path of the micro-optical bench device.
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