发明公开
EP3270132A1 MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME 审中-公开
MEMS压力传感器及其定位方法

MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME
摘要:
An MEMS pressure sensing apparatus includes an MEMS pressure sensor, and first and second film sheets. The MEMS pressure sensor has a first space on a side of a pressure detection surface of a diaphragm, has the diaphragm for detecting a pressure using the pressure detection surface facing the first space, and outputs an electrical signal corresponding to the detected pressure. The first film sheet is placed on and in contact with a part under measurement so as to support the MEMS pressure sensor, and has a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface, where the size of the first film sheet being larger than the first space. The second film sheet has a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, and is placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement.
公开/授权文献
信息查询
0/0