发明公开
- 专利标题: MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME
- 专利标题(中): MEMS压力传感器及其定位方法
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申请号: EP15885595.7申请日: 2015-12-11
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公开(公告)号: EP3270132A1公开(公告)日: 2018-01-17
- 发明人: TAKAHASHI, Shinichi
- 申请人: Act Medical Service Co., Ltd.
- 申请人地址: 19-3, Aza Kawaharamae Minamisawamata Fukushima-shi Fukushima 960-8254 JP
- 专利权人: Act Medical Service Co., Ltd.
- 当前专利权人: Act Medical Service Co., Ltd.
- 当前专利权人地址: 19-3, Aza Kawaharamae Minamisawamata Fukushima-shi Fukushima 960-8254 JP
- 代理机构: Eisenführ Speiser
- 优先权: JP2015050920 20150313
- 国际公布: WO2016147503 20160922
- 主分类号: G01L19/00
- IPC分类号: G01L19/00 ; A61B5/02 ; A61B5/022
摘要:
An MEMS pressure sensing apparatus includes an MEMS pressure sensor, and first and second film sheets. The MEMS pressure sensor has a first space on a side of a pressure detection surface of a diaphragm, has the diaphragm for detecting a pressure using the pressure detection surface facing the first space, and outputs an electrical signal corresponding to the detected pressure. The first film sheet is placed on and in contact with a part under measurement so as to support the MEMS pressure sensor, and has a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface, where the size of the first film sheet being larger than the first space. The second film sheet has a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, and is placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement.
公开/授权文献
- EP3270132B1 MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME 公开/授权日:2021-04-07
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