MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME
    3.
    发明公开
    MEMS PRESSURE SENSOR AND METHOD FOR POSITIONING SAME 审中-公开
    MEMS压力传感器及其定位方法

    公开(公告)号:EP3270132A1

    公开(公告)日:2018-01-17

    申请号:EP15885595.7

    申请日:2015-12-11

    IPC分类号: G01L19/00 A61B5/02 A61B5/022

    摘要: An MEMS pressure sensing apparatus includes an MEMS pressure sensor, and first and second film sheets. The MEMS pressure sensor has a first space on a side of a pressure detection surface of a diaphragm, has the diaphragm for detecting a pressure using the pressure detection surface facing the first space, and outputs an electrical signal corresponding to the detected pressure. The first film sheet is placed on and in contact with a part under measurement so as to support the MEMS pressure sensor, and has a second space communicating with the first space and having a size in a direction parallel to the pressure detection surface, where the size of the first film sheet being larger than the first space. The second film sheet has a third space with a size in a direction parallel to the pressure detection surface for positioning the MEMS pressure sensing apparatus on the part under measurement, and is placed such that an area of the part under measurement is located in the third space before the MEMS pressure sensing apparatus is placed on the part under measurement.

    摘要翻译: MEMS压力感测设备包括MEMS压力传感器,以及第一和第二膜片。 MEMS压力传感器在膜片的压力检测面侧具有第一空间,并且具有使用与第一空间对置的压力检测面检测压力的膜片,并输出与检测到的压力对应的电信号。 第一膜片放置在被测量部件上并与其接触以支撑MEMS压力传感器,并具有与第一空间连通的第二空间,第二空间的尺寸在与压力检测表面平行的方向上,其中 第一膜片的尺寸大于第一空间。 第二膜片具有第三空间,该第三空间在与压力检测表面平行的方向上具有尺寸,用于将MEMS压力传感设备定位在待测零件上,并且被放置为使得被测零件的面积位于第三 将MEMS压力传感装置放置在被测零件上之前的空间。