发明公开
- 专利标题: VACUUM COATING APPARATUS
- 专利标题(中): 真空镀膜设备
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申请号: EP16002019.4申请日: 2016-09-16
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公开(公告)号: EP3296423A1公开(公告)日: 2018-03-21
- 发明人: MORENI, Franco , COREA, Antonio , VISCOMI, Giuseppe
- 申请人: Satisloh AG
- 申请人地址: Neuhofstrasse 12 6340 Baar CH
- 专利权人: Satisloh AG
- 当前专利权人: Satisloh AG
- 当前专利权人地址: Neuhofstrasse 12 6340 Baar CH
- 代理机构: Oppermann, Mark
- 主分类号: C23C14/50
- IPC分类号: C23C14/50 ; C23C14/04
摘要:
A box coating apparatus (10) for vacuum coating of substrates comprises a vacuum chamber (12) containing an evaporation source (14) and a substrate holder (16) formed as a dome vis-à-vis to the evaporation source and rotatable about an axis (R). A masking arrangement (20) is located in between for partially shadowing the substrates on the substrate holder relative to the evaporation source. The masking arrangement comprises a fixed masking portion (22) stationary in the vacuum chamber, and a plurality of gradient sector portions (24, 26, 28) carrying gradient shields assigned to the substrates on the substrate holder, for forming a gradient mask. The gradient sector portions can be rotated about said axis between a gradient mask open position where they are stored behind the fixed masking portion, and a gradient mask closed position where they are spread like a fan between the evaporation source and the substrate holder.
公开/授权文献
- EP3296423B1 VACUUM COATING APPARATUS 公开/授权日:2019-01-30
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