发明公开
- 专利标题: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
- 专利标题(中): 半导体器件及其制造方法
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申请号: EP17188981.9申请日: 2017-09-01
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公开(公告)号: EP3301723A1公开(公告)日: 2018-04-04
- 发明人: ZHOU, Ming
- 申请人: Semiconductor Manufacturing International Corporation (Beijing) , Semiconductor Manufacturing International Corporation (Shanghai)
- 申请人地址: No. 18, Wenchang Road Beijing Economic and Technological Development Area, Daxing Area Beijing 100176 CN
- 专利权人: Semiconductor Manufacturing International Corporation (Beijing),Semiconductor Manufacturing International Corporation (Shanghai)
- 当前专利权人: Semiconductor Manufacturing International Corporation (Beijing),Semiconductor Manufacturing International Corporation (Shanghai)
- 当前专利权人地址: No. 18, Wenchang Road Beijing Economic and Technological Development Area, Daxing Area Beijing 100176 CN
- 代理机构: Klunker IP Patentanwälte PartG mbB
- 优先权: CN201610868166 20160930
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/786
摘要:
The present invention relates to the technical field of semiconductor processes and discloses a semiconductor device and a manufacturing method therefor. The method includes: providing a substrate containing a first dielectric layer; forming a lower gate material layer on the first dielectric layer; patterning the lower gate material layer to form gate lines; depositing a second dielectric layer to cover the gate lines; planarizing the second dielectric layer; forming an insulating buffer material layer; patterning the insulating buffer material layer to form a patterned insulating buffer layer containing multiple separate portions, each separate portion extending to intersect one or more gate lines; selectively growing a graphene layer on the patterned insulating buffer layer; forming a third dielectric layer to cover the graphene layer and the second dielectric layer; and forming an upper gate electrode layer on the third dielectric layer. In the present invention, a patterned graphene layer may be obtained by means of the selective growth of graphene, thereby avoiding undesired effects from patterning the graphene. In addition, the semiconductor device of the present invention may use a dual-gate structure that can offer better current control.
公开/授权文献
- EP3301723B1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR 公开/授权日:2020-11-04
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