- 专利标题： METHOD TO CONTROL THE TEMPERATURE OF AN ELECTROMAGNETIC PUMP
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申请号： EP17720141.5申请日： 2017-05-01
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公开(公告)号： EP3452632A1公开(公告)日： 2019-03-13
- 发明人: ZOESTBERGEN, Edzo , COMMANDEUR, Colin , SNIJDERS, Roland, Jan , BAKKER, Eduard, Paul, Mattheus , HAZELETT, Peter, William , HAMILTON, Douglas, Alexander , WIDDIS, Stephen, James , KAISER, Timothy, Dean
- 申请人： Tata Steel Nederland Technology B.V.
- 申请人地址： Wenckebachstraat 1 1951 JZ Velsen-Noord NL
- 专利权人： Tata Steel Nederland Technology B.V.
- 当前专利权人： Tata Steel Nederland Technology B.V.
- 当前专利权人地址： Wenckebachstraat 1 1951 JZ Velsen-Noord NL
- 代理机构： Blauw, Frans Gerard
- 优先权： EP16168173 20160503
- 国际公布： WO2017191081 20171109
- 主分类号： C23C14/24
- IPC分类号： C23C14/24 ; H02K44/00
摘要：
The invention relates to a method to control the temperature of an electromagnetic pump in an apparatus wherein a liquid metal is supplied through a feed tube from a container adapted to contain a liquid metal to an evaporator device in a vacuum chamber, wherein the temperature of the electromagnetic pump is controlled by controlling one or more of the force exerted on the liquid metal in the container, the current of the electromagnetic pump, and/or the strength of the magnet field of the electromagnetic pump.
公开/授权文献
- EP3452632B1 METHOD TO CONTROL THE TEMPERATURE OF AN ELECTROMAGNETIC PUMP 公开/授权日：2020-07-08
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