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公开(公告)号：EP3452632A1
公开(公告)日：2019-03-13
申请号：EP17720141.5
申请日：2017-05-01
发明人： ZOESTBERGEN, Edzo , COMMANDEUR, Colin , SNIJDERS, Roland, Jan , BAKKER, Eduard, Paul, Mattheus , HAZELETT, Peter, William , HAMILTON, Douglas, Alexander , WIDDIS, Stephen, James , KAISER, Timothy, Dean
摘要： The invention relates to a method to control the temperature of an electromagnetic pump in an apparatus wherein a liquid metal is supplied through a feed tube from a container adapted to contain a liquid metal to an evaporator device in a vacuum chamber, wherein the temperature of the electromagnetic pump is controlled by controlling one or more of the force exerted on the liquid metal in the container, the current of the electromagnetic pump, and/or the strength of the magnet field of the electromagnetic pump.
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公开(公告)号：EP3452631B1
公开(公告)日：2020-03-25
申请号：EP17721357.6
申请日：2017-05-01
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公开(公告)号：EP3452633A1
公开(公告)日：2019-03-13
申请号：EP17720142.3
申请日：2017-05-01
发明人： ZOESTBERGEN, Edzo , COMMANDEUR, Colin , SNIJDERS, Roland, Jan , BAKKER, Eduard, Paul, Mattheus , HAZELETT, Peter, William , HAMILTON, Douglas, Alexander , WIDDIS, Stephen, James , KAISER, Timothy, Dean
摘要： An apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the apparatus includes a container adapted to contain a liquid metal, a feed tube from the closed container to the evaporator device and an electromagnetic pump provided in the feed tube, and wherein the electromagnetic pump is placed in a vacuum enclosure.
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公开(公告)号：EP3452633B1
公开(公告)日：2020-03-25
申请号：EP17720142.3
申请日：2017-05-01
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公开(公告)号：EP3452632B1
公开(公告)日：2020-07-08
申请号：EP17720141.5
申请日：2017-05-01
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公开(公告)号：EP3452631A1
公开(公告)日：2019-03-13
申请号：EP17721357.6
申请日：2017-05-01
发明人： ZOESTBERGEN, Edzo , COMMANDEUR, Colin , SNIJDERS, Roland, Jan , BAKKER, Eduard, Paul, Mattheus , HAZELETT, Peter, William , HAMILTON, Douglas, Alexander , WIDDIS, Stephen, James , KAISER, Timothy, Dean
摘要： A method to operate an apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the feed tube runs from a container adapted to contain a liquid metal to the evaporator device and wherein an electromagnetic pump is provided in the feed tube and a valve in the feed tube between the electromagnetic pump and the evaporator device. An at least partially gas permeable electromagnetic pump, which is enclosed in a pressure controlled enclosure, is used in the method wherein electromagnetic pump and the pressure controlled enclosure are controlled such that filling and draining of the evaporator device and feed tube can be done without affecting the vacuum pressure in the vacuum chamber.
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