BIOLOGICAL TISSUE INSPECTION DEVICE AND METHOD THEREFOR
摘要:
A biological tissue inspection device is disclosed. The biological tissue inspection device comprises a stage portion and a probe portion. The probe portion comprises an optical imaging portion, an optical interference detection portion, and an optical induction portion. An inspection object is loaded on the stage portion. The probe portion acquires data regarding optical images and optical interference, which are related to the inspection object, through the optical imaging portion and the optical interference detection portion. The stage portion or the probe portion may move such that a selected area of the inspection object is positioned in the FOV of the optical imaging portion and of the optical interference detection portion. The optical induction portion is configured such that illumination light from the optical imaging portion and measurement light from the optical interference detection portion are coaxially emitted to the inspection object. A guide beam may be additionally emitted to display the area that is being measured. A magnification changing portion is included to adjust the magnification of the measured image. As lenses are changed by the magnification changing portion, the position of a reference mirror included in the optical interference detection portion is changed together in order to correct the optical path difference.
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