- 专利标题： MULTI-ELECTRON-BEAM IMAGING APPARTUS WITH IMPROVED PERORMANCE
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申请号： EP18194496.8申请日： 2018-09-14
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公开(公告)号： EP3624167A1公开(公告)日： 2020-03-18
- 发明人: Mohammadi-Gheidari, Ali , Tiemeijer, Peter Christiaan , Kieft, Erik René , Veen, van Gerard Nicolaas Anne
- 申请人： FEI Company
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 专利权人： FEI Company
- 当前专利权人： FEI Company
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, OR 97124-5793 US
- 代理机构： Janssen, Francis-Paul
- 主分类号： H01J37/04
- IPC分类号： H01J37/04 ; H01J37/06 ; H01J37/147 ; H01J37/153
摘要：
An electron beam imaging apparatus comprising:
- A specimen holder, for holding a specimen;
- An electron source, for producing a precursor electron beam;
- An aperture plate comprising an array of apertures, for producing an array of electron beams from said precursor electron beam;
- An electron beam column, for directing said array of electron beams onto said specimen,
wherein said electron beam column is configured to have a length L less than 300 mm.
- A specimen holder, for holding a specimen;
- An electron source, for producing a precursor electron beam;
- An aperture plate comprising an array of apertures, for producing an array of electron beams from said precursor electron beam;
- An electron beam column, for directing said array of electron beams onto said specimen,
wherein said electron beam column is configured to have a length L less than 300 mm.
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