- 专利标题： ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
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申请号： EP19171989.7申请日： 2019-04-30
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公开(公告)号： EP3627537A1公开(公告)日： 2020-03-25
- 发明人: HEO, Jinseong , LEE, Yunseong , JO, Sanghyun , SHIN, Keunwook , SHIN, Hyeonjin
- 申请人： Samsung Electronics Co., Ltd.
- 申请人地址： 129, Samsung-ro Yeongtong-gu Suwon-si Gyeonggi-do 16677 KR
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： 129, Samsung-ro Yeongtong-gu Suwon-si Gyeonggi-do 16677 KR
- 代理机构： Elkington and Fife LLP
- 优先权： KR20180111596 20180918
- 主分类号： H01L21/28
- IPC分类号： H01L21/28 ; H01L29/51 ; H01L29/66 ; H01L27/11502
摘要：
Provided are electronic devices and methods of manufacturing the same. An electronic device may include a substrate, a gate electrode on the substrate, a ferroelectric layer between the substrate and the gate electrode, and a carbon layer between the substrate and the ferroelectric layer. The carbon layer may have an sp 2 bonding structure.
公开/授权文献
- EP3627537B1 ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME 公开/授权日：2024-03-13
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