发明公开
- 专利标题: SURFACE SHAPE MEASUREMENT DEVICE
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申请号: EP18905650.0申请日: 2018-11-02
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公开(公告)号: EP3736527A1公开(公告)日: 2020-11-11
- 发明人: TAKANASHI, Ryo
- 申请人: Tokyo Seimitsu Co., Ltd.
- 申请人地址: 2968-2, Ishikawa-machi Hachioji-shi, Tokyo 192-8515 JP
- 专利权人: Tokyo Seimitsu Co., Ltd.
- 当前专利权人: Tokyo Seimitsu Co., Ltd.
- 当前专利权人地址: 2968-2, Ishikawa-machi Hachioji-shi, Tokyo 192-8515 JP
- 代理机构: m patent group
- 优先权: JP2018020118 20180207
- 国际公布: WO2019155698 20190815
- 主分类号: G01B5/20
- IPC分类号: G01B5/20 ; G01B5/28 ; G01B21/20 ; G01B21/30
摘要:
There is provided a surface shape measurement device which can simultaneously measure a surface roughness of a measurement target surface and surface shapes other than the surface roughness of the measurement target surface, and prevent a sensing pin from being damaged. The present invention comprises: a detector; a first elastic support member which supports the detector swingably in a first rotation direction and in a second rotation direction opposite to the first rotation direction; a drive part which moves the first elastic support member along a driving direction which is orthogonal to an axis direction of a swing fulcrum and parallel to the measurement target surface; a detector guide which has a linear shape and guides the detector driven by the drive part via the first elastic support member along the measurement target surface; a guide support member which has one or multiple first contact points in contact with the measurement target surface and supports the detector guide at a position facing a surface of the detector opposite to a surface of the detector facing the measurement target surface; and a detector support member which is provided to the detector and causes the detector guide to support the detector movably along the detector guide.
公开/授权文献
- EP3736527B1 SURFACE SHAPE MEASUREMENT DEVICE 公开/授权日:2022-03-23
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