SURFACE SHAPE MEASUREMENT DEVICE
摘要:
There is provided a surface shape measurement device which can simultaneously measure a surface roughness of a measurement target surface and surface shapes other than the surface roughness of the measurement target surface, and prevent a sensing pin from being damaged. The present invention comprises: a detector; a first elastic support member which supports the detector swingably in a first rotation direction and in a second rotation direction opposite to the first rotation direction; a drive part which moves the first elastic support member along a driving direction which is orthogonal to an axis direction of a swing fulcrum and parallel to the measurement target surface; a detector guide which has a linear shape and guides the detector driven by the drive part via the first elastic support member along the measurement target surface; a guide support member which has one or multiple first contact points in contact with the measurement target surface and supports the detector guide at a position facing a surface of the detector opposite to a surface of the detector facing the measurement target surface; and a detector support member which is provided to the detector and causes the detector guide to support the detector movably along the detector guide.
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