- 专利标题: ASSEMBLY FOR COLLIMATING BROADBAND RADIATION
-
申请号: EP19197449.2申请日: 2019-09-16
-
公开(公告)号: EP3792673A1公开(公告)日: 2021-03-17
- 发明人: NI, Yongfeng , HUGERS, Ronald Franciscus Herman , BROUNS, Andreas, Johannes, Antonius
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL 5500 AH Veldhoven P.O. Box 324
- 代理机构: ASML Netherlands B.V.
- 主分类号: G02B7/02
- IPC分类号: G02B7/02 ; G02B6/32 ; G03F7/20
摘要:
An assembly for collimating broadband radiation, the assembly comprising: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common centre; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common centre.
信息查询
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B7/00 | 光学元件的安装、调整装置或不漏光连接 |
G02B7/02 | .用于透镜 |