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公开(公告)号：EP4224250A2
公开(公告)日：2023-08-09
申请号：EP23166047.3
申请日：2020-08-20
发明人： GÖTZ, Peter, Maximilian , BAUERSCHMIDT, Sebastian, Thomas , UEBEL, Patrick, Sebastian , HUGERS, Ronald Franciscus Herman , BOER, Jan, Adrianus , BOS, Edwin, Johannes, Cornelis , BROUNS, Andreas, Johannes, Antonius , PROSYENTSOV, Vitaliy , SCHOLTES - VAN EIJK, Paul, William , TEUNISSEN, Paulus, Antonius, Andreas , AJGAONKAR, Mahesh, Upendra
摘要： Disclosed is a polarization control system and method. The system controls the output polarization of a broadband light source comprising a waveguide. The system comprises at least one detection unit configured to measure one or more parameters of radiation emitted from said broadband light source to generate measurement data; and comprises a processing unit configured to infer a polarization property of said radiation emitted from said broadband light source from said measurement data. Based on the evaluation, the polarization control system generates a control signal for optimization of the pump polarization conditions of said broadband light source. The pump polarization conditions relating to the coupling of a pump laser beam with respect to a fiber axis of the photonic crystal fiber.
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公开(公告)号：EP3696607A1
公开(公告)日：2020-08-19
申请号：EP20152335.4
申请日：2020-01-17
摘要： Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.
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公开(公告)号：EP3792673A1
公开(公告)日：2021-03-17
申请号：EP19197449.2
申请日：2019-09-16
摘要： An assembly for collimating broadband radiation, the assembly comprising: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common centre; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common centre.
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公开(公告)号：EP3988996A1
公开(公告)日：2022-04-27
申请号：EP20202720.7
申请日：2020-10-20
发明人： TRAVERS, John Colin , BELLI, Federico , BRAHMS, Malte Christian , BROUNS, Andreas Johannes Antonius , HUGERS, Ronald Franciscus Herman
摘要： A broadband radiation source device, comprising a fiber assembly comprising a plurality of optical fibers, each optical fiber being filled with a gas medium; wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of said plurality of optical fibers at any one time.
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公开(公告)号：EP3789809A1
公开(公告)日：2021-03-10
申请号：EP20189296.5
申请日：2020-08-04
摘要： An assembly for collimating broadband radiation, the assembly comprising: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common centre; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common centre.
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公开(公告)号：EP4224250A3
公开(公告)日：2023-09-06
申请号：EP23166047.3
申请日：2020-08-20
发明人： GÖTZ, Peter, Maximilian , BAUERSCHMIDT, Sebastian, Thomas , UEBEL, Patrick, Sebastian , HUGERS, Ronald Franciscus Herman , BOER, Jan, Adrianus , BOS, Edwin, Johannes, Cornelis , BROUNS, Andreas, Johannes, Antonius , PROSYENTSOV, Vitaliy , SCHOLTES - VAN EIJK, Paul, William , TEUNISSEN, Paulus, Antonius, Andreas , AJGAONKAR, Mahesh, Upendra
摘要： Disclosed is a polarization control system and method. The system controls the output polarization of a broadband light source comprising a waveguide. The system comprises at least one detection unit configured to measure one or more parameters of radiation emitted from said broadband light source to generate measurement data; and comprises a processing unit configured to infer a polarization property of said radiation emitted from said broadband light source from said measurement data. Based on the evaluation, the polarization control system generates a control signal for optimization of the pump polarization conditions of said broadband light source. The pump polarization conditions relating to the coupling of a pump laser beam with respect to a fiber axis of the photonic crystal fiber.
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公开(公告)号：EP3964888A1
公开(公告)日：2022-03-09
申请号：EP21189551.1
申请日：2021-08-04
发明人： TRAVERS, John, Colin , BELLI, Federico , BRAHMS, Malte, Christian , BROUNS, Andreas, Johannes, Antonius , HUGERS, Ronald Franciscus Herman
摘要： A broadband radiation source device, comprising a fiber assembly comprising a plurality of optical fibers, each optical fiber being filled with a gas medium; wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of said plurality of optical fibers at any one time.
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公开(公告)号：EP3786703A1
公开(公告)日：2021-03-03
申请号：EP20191997.4
申请日：2020-08-20
发明人： GÖTZ, Peter, Maximilian , BAUERSCHMIDT, Sebastian, Thomas , UEBEL, Patrick, Sebastian , HUGERS, Ronald Franciscus Herman , BOER, Jan, Adrianus , BOS, Edwin, Johannes, Cornelis , BROUNS, Andreas, Johannes, Antonius , PROSYENTSOV, Vitaliy , SCHOLTES - VAN EIJK, Paul, William , TEUNISSEN, Paulus, Antonius, Andreas , AJGAONKAR, Mahesh, Upendra
摘要： Disclosed is a mode control system and method for controlling an output mode of a broadband light source comprising a photonic crystal fiber (PCF). The mode control system comprises at least one detection unit configured to measure one or more parameters of radiation emitted from said broadband light source to generate measurement data; and a processing unit configured to evaluate mode purity of said radiation emitted from said broadband light source, from said measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of said broadband light source. The pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：EP3696606A1
公开(公告)日：2020-08-19
申请号：EP19157342.7
申请日：2019-02-15
摘要： Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.
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公开(公告)号：EP3394563A1
公开(公告)日：2018-10-31
申请号：EP16802087.3
申请日：2016-11-30
发明人： HUGERS, Ronald Franciscus Herman , REIJNEN, Martinus Cornelis , TEUNISSEN, Paulus Antonius Andreas
CPC分类号： G03F9/7026 , G01B11/254 , G01B11/2545 , G01B2210/56 , G01N21/9501 , H01L22/12
摘要： A topography measurement system includes a radiation source; a first grating; imaging optics; a movement mechanism; detection optics; a second grating; and a detector. The radiation source is configured to generate a radiation beam including ultraviolet radiation and includes a light emitting diode to produce to ultraviolet radiation. The first grating is configured to pattern the radiation beam. The imaging optics is configured to form a first image of the first grating at a target location on a substrate. The movement mechanism is operable to move the substrate relative to the image of the first grating such that the target location moves relative to the substrate. The detection optics is configured to receive radiation from the target location of the substrate and form an image of the first image at the second grating. The detector is configured to receive radiation transmitted through the second grating and produce an output signal.
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