TRANSDUCER WITH IMPROVED PIEZOELECTRIC ARRANGEMENT, MEMS DEVICE COMPRISING THE TRANSDUCER, AND METHODS FOR MANUFACTURING THE TRANSDUCER
摘要:
A transducer (1; 20'; 20") comprising: a supporting body (8); a suspended structure (2; 22), mechanically coupled to the supporting body (8), having a first and a second surface (2a, 2b; 22a, 22b) opposite to one another along an axis (Z), and configured to oscillate in an oscillation direction having at least one component parallel to said axis (Z); a first piezoelectric transducer (4), which extends over the first surface (2a; 22a) of the suspended structure (2; 22); and a second piezoelectric transducer (6), which extends over the second surface (2b; 22b) of the suspended structure (2; 22).
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