- 专利标题: TRANSDUCER WITH IMPROVED PIEZOELECTRIC ARRANGEMENT, MEMS DEVICE COMPRISING THE TRANSDUCER, AND METHODS FOR MANUFACTURING THE TRANSDUCER
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申请号: EP20200134.3申请日: 2020-10-05
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公开(公告)号: EP3809476A1公开(公告)日: 2021-04-21
- 发明人: SEGHIZZI, Luca , VERCESI, Federico , PEDRINI, Claudia
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构: Bertolotto, Simone
- 优先权: IT201900019058 20191016
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; B06B1/06 ; B41J2/14 ; B81B3/00 ; F04B43/04 ; H01L41/09 ; H01L41/113 ; H01L41/31 ; H04R17/00
摘要:
A transducer (1; 20'; 20") comprising: a supporting body (8); a suspended structure (2; 22), mechanically coupled to the supporting body (8), having a first and a second surface (2a, 2b; 22a, 22b) opposite to one another along an axis (Z), and configured to oscillate in an oscillation direction having at least one component parallel to said axis (Z); a first piezoelectric transducer (4), which extends over the first surface (2a; 22a) of the suspended structure (2; 22); and a second piezoelectric transducer (6), which extends over the second surface (2b; 22b) of the suspended structure (2; 22).
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