- 专利标题: INTEGRATED CIRCUITS CONTAINING VERTICALLY-INTEGRATED CAPACITOR-AVALANCHE DIODE STRUCTURES
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申请号: EP21152192.7申请日: 2021-01-18
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公开(公告)号: EP3859779A1公开(公告)日: 2021-08-04
- 发明人: Schultz, Joseph Gerard , Kim, Kevin
- 申请人: NXP USA, Inc.
- 申请人地址: US Austin TX 78735 6501 William Cannon Drive West
- 代理机构: Miles, John Richard
- 优先权: US202016775573 20200129
- 主分类号: H01L27/02
- IPC分类号: H01L27/02 ; H01L27/06 ; H01L23/64
摘要:
Integrated circuits, such as power amplifier integrated circuits, are disclosed containing compact-footprint, vertically-integrated capacitor-avalanche diode (AD) structures. In embodiments, the integrated circuit includes a semiconductor substrate, a metal layer system, and a vertically-integrated capacitor-AD structure. The metal layer system includes, in turn, a body of dielectric material in which a plurality of patterned metal layers are located. The vertically-integrated capacitor-AD structure includes a first AD formed, at least in part, by patterned portions of the first patterned metal layer. A first metal-insulator-metal (MIM) capacitor is also formed in the metal layer system and at least partially overlaps with the first AD, as taken along a vertical axis orthogonal to the principal surface of the semiconductor substrate. In certain instances, at least a majority, if not the entirety of the first AD vertically overlaps with the first MIM capacitor, by surface area, as taken along the vertical axis.
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