• 专利标题: TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LOSS SPECTROSCOPY DETECTOR
  • 申请号: EP20167235.9
    申请日: 2020-03-31
  • 公开(公告)号: EP3889995A1
    公开(公告)日: 2021-10-06
  • 发明人: Tiemeijer, Peter Christiaan
  • 申请人: FEI Company
  • 申请人地址: US Hillsboro, OR 97124-5793 5350 NE Dawson Creek Drive
  • 代理机构: Janssen, Francis-Paul
  • 主分类号: H01J37/26
  • IPC分类号: H01J37/26
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LOSS SPECTROSCOPY DETECTOR
摘要:
The invention relates to a transmission charged particle microscope comprising a charged particle beam source for emitting a charged particle beam, a sample holder for holding a sample, an illuminator for directing the charged particle beam emitted from the charged particle beam source onto the sample, and a control unit for controlling operations of the transmission charged particle microscope. As defined herein, the transmission charged particle microscope is arranged for operating in at least two modes that substantially yield a first magnification whilst keeping said diffraction pattern substantially in focus. Said at least two modes comprise a first mode having first settings of a final projector lens of a projecting system; and a second mode having second settings of said final projector lens.
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