MICROMIRROR DEVICE AND METHOD FOR DRIVING MICROMIRROR DEVICE
摘要:
A micromirror device includes first and second actuators, which are piezoelectric actuators each having a piezoelectric element in which a lower electrode, a piezoelectric film, and an upper electrode are laminated on an oscillation plate. In each of the piezoelectric elements, each upper electrode is formed of a plurality of individual electrode parts, each of which is separated by a first stress inversion region and a second stress inversion region, and includes a plurality of piezoelectric parts respectively defined by the plurality of individual electrode parts. In the first stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in an in-plane direction of the piezoelectric film in a maximum displacement state in a case of driving in a first resonance mode in which the mirror part is tilted and displaced around the first axis. In the second stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in the in-plane direction of the piezoelectric film in a case of driving in a second resonance mode in which the mirror part is tilted and displaced around the second axis.
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