- 专利标题: MICROMIRROR DEVICE AND METHOD FOR DRIVING MICROMIRROR DEVICE
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申请号: EP20777313.6申请日: 2020-02-19
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公开(公告)号: EP3950572A1公开(公告)日: 2022-02-09
- 发明人: NAONO, Takayuki
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo 106-8620 26-30, Nishiazabu 2-chome Minato-ku
- 代理机构: Parker, Andrew James
- 优先权: JP2019063659 20190328
- 国际公布: WO2020195385 20201001
- 主分类号: B81B3/00
- IPC分类号: B81B3/00 ; H01L41/09 ; H01L41/187 ; G02B26/08 ; G02B26/10
摘要:
A micromirror device includes first and second actuators, which are piezoelectric actuators each having a piezoelectric element in which a lower electrode, a piezoelectric film, and an upper electrode are laminated on an oscillation plate. In each of the piezoelectric elements, each upper electrode is formed of a plurality of individual electrode parts, each of which is separated by a first stress inversion region and a second stress inversion region, and includes a plurality of piezoelectric parts respectively defined by the plurality of individual electrode parts. In the first stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in an in-plane direction of the piezoelectric film in a maximum displacement state in a case of driving in a first resonance mode in which the mirror part is tilted and displaced around the first axis. In the second stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in the in-plane direction of the piezoelectric film in a case of driving in a second resonance mode in which the mirror part is tilted and displaced around the second axis.
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