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公开(公告)号：EP4286916A1
公开(公告)日：2023-12-06
申请号：EP22745722.3
申请日：2022-01-20
申请人： FUJIFILM Corporation
摘要： An optical scanning device includes: a micromirror device including a mirror portion that has a reflecting surface for reflecting incident light, a first actuator that allows the mirror portion to swing around a first axis located in a plane including the reflecting surface in a case in which the mirror portion is stationary, and a second actuator that allows the mirror portion to swing around a second axis orthogonal to the first axis in the plane; and a processor that causes the mirror portion to perform precession by providing a first driving signal and a second driving signal each having the same driving frequency to the first actuator and the second actuator, respectively. In the micromirror device, a relationship of f 2 1 is satisfied in a case in which a resonance frequency around the first axis is denoted by f 1 and a resonance frequency around the second axis is denoted by f 2 , and a relationship of f d ≤ f 1 is satisfied in a case in which the driving frequency is denoted by f d .
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公开(公告)号：EP4270051A1
公开(公告)日：2023-11-01
申请号：EP23167690.9
申请日：2023-04-13
申请人： FUJIFILM Corporation
发明人： ABE, Masaaki , NAONO, Takayuki , NISHIURA, Yosuke
IPC分类号： G01S7/481
摘要： Provided are an optical scanning device and an abnormality detection method with which an abnormal operation of a mirror can be detected at high speed during the operation.
An optical scanning device of the present disclosure includes: a micromirror device including a mirror that has a reflecting surface for reflecting light and is swingable around at least one axis, an actuator that allows the mirror to swing, and a piezoelectric element that generates and outputs electromotive force by the swinging of the mirror; a control device configured to control an operation of the actuator; and an abnormality detection device configured to detect an abnormal operation of the mirror based on a temporal fluctuation amount in an output signal from the piezoelectric element.-
3.发明授权
公开(公告)号：EP2319103B1
公开(公告)日：2018-06-13
申请号：EP09802687.5
申请日：2009-07-27
申请人： FUJIFILM Corporation
发明人： HISHINUMA, Yoshikazu , KASAHARA, Takehiro , NIHEI, Yasukazu , FUJII, Takamichi , OKAMOTO, Yuuichi , ARAKAWA, Takami , NAONO, Takayuki
IPC分类号： H01L41/09 , H01L41/316 , H01L41/187 , C04B35/49 , B41J2/16
CPC分类号： B41J2/161 , B41J2/1646 , C04B35/49 , H01L41/0805 , H01L41/0973 , H01L41/1875 , H01L41/316 , Y10T29/42
摘要： A piezoelectric device, including the following on a substrate in the order listed below: a lower electrode, a piezoelectric film which contains a Pb containing perovskite oxide represented by a general expression (P) below, and an upper electrode, in which the piezoelectric film has a layer of pyrochlore oxide on the surface facing the lower electrode, and the average layer thickness of the pyrochlore oxide layer is not greater than 20 nm. AaBbO3 (P) where, A: at least one type of A-site element containing Pb as a major component, B: at least one type of B-site element selected from the group consisting of Ti, Zr, V, Nb, Ta, Cr, Mo, W, Mn, Sc, Co, Cu, In, Sn, Ga, Zn, Cd, Fe, and Ni, and O: an oxygen element.
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公开(公告)号：EP2952853A1
公开(公告)日：2015-12-09
申请号：EP14746045.5
申请日：2014-01-29
申请人： Fujifilm Corporation
发明人： NAONO, Takayuki , NAKANO, Takuma
IPC分类号： G01C19/5783
CPC分类号： G01C19/5712 , G01C19/56 , G01C25/00 , G01P15/09 , G01P15/097
摘要： One or more vibration plate layers (21, 22) that constitute a diaphragm part (12) are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor (10) and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part (14) is defined as M milligrams, a circumference of the diaphragm part (12) is defined as r meters, a stress applied to a piezoelectric layer (32) is defined as σ p pascals, a thickness thereof is defined as t p meters, a stress applied to an n-th layer from the side of the weight part (14) in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers (21, 22) is defined as σ n pascals, and a thickness thereof is defined as t n meters (where n is a natural number), T eff expressed by T eff = r(σ p t p + Σσ n t n )/M satisfies {(-0.36f 2 + 210)/33} ≤ T eff ≤ {(0.44f 2 + 210)/33}.
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公开(公告)号：EP4209822A1
公开(公告)日：2023-07-12
申请号：EP22214091.5
申请日：2022-12-16
申请人： FUJIFILM Corporation
发明人： NAONO, Takayuki
摘要： To provide an optical scanning device and a control method thereof capable of reducing power consumption required for driving and reducing a change in power consumption with a change over time.
An optical scanning device causes a mirror portion to perform a spiral rotation operation with a first driving signal applied to a first actuator and a second driving signal applied to a second actuator as cyclic voltage signals. In a case where a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a first axis, closest to a frequency of the cyclic voltage signal are respectively set as f r1 and Q 1 , a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a second axis, closest to the frequency of the cyclic voltage signal are respectively set as f r2 and Q 2 , and the frequency of the cyclic voltage signal is f d , a relationship of Q 1 ≠ Q 2 , F r2 r1 , and f r2 × (1 - 1/(1.2 × Q 2 )) ≤ f d ≤ f r1 × (1 + 1/(6 × Q 1 )) is satisfied.-
公开(公告)号：EP3998505A1
公开(公告)日：2022-05-18
申请号：EP20796443.8
申请日：2020-04-24
申请人： FUJIFILM Corporation
发明人： NAONO, Takayuki , AOSHIMA, Keisuke
摘要： A micromirror device includes: a mirror part; a first actuator in which a pair of semi-annular actuator parts surrounds the mirror part; a connecting part that connects the mirror part and the first actuator such that the mirror part is rotatable around a first axis; a fixing part that is disposed at an outer periphery of the first actuator; and a second actuator in which a pair of meandering type actuator parts are disposed with the first actuator interposed therebetween. Each of the pair of meandering type actuator parts is disposed such that a longitudinal direction of the rectangular plate-like part is a direction along the first axis, one end of each meandering type actuator part is connected to an outer periphery of each of the pair of semi-annular actuator parts, and another end of each meandering type actuator part is connected to the fixing part. Each actuator part includes a piezoelectric element.
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公开(公告)号：EP3950572A1
公开(公告)日：2022-02-09
申请号：EP20777313.6
申请日：2020-02-19
申请人： FUJIFILM Corporation
发明人： NAONO, Takayuki
IPC分类号： B81B3/00 , H01L41/09 , H01L41/187 , G02B26/08 , G02B26/10
摘要： A micromirror device includes first and second actuators, which are piezoelectric actuators each having a piezoelectric element in which a lower electrode, a piezoelectric film, and an upper electrode are laminated on an oscillation plate. In each of the piezoelectric elements, each upper electrode is formed of a plurality of individual electrode parts, each of which is separated by a first stress inversion region and a second stress inversion region, and includes a plurality of piezoelectric parts respectively defined by the plurality of individual electrode parts. In the first stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in an in-plane direction of the piezoelectric film in a maximum displacement state in a case of driving in a first resonance mode in which the mirror part is tilted and displaced around the first axis. In the second stress inversion region, positive and negative of a principal stress component having a maximum absolute value are inverted in a principal stress generated in the in-plane direction of the piezoelectric film in a case of driving in a second resonance mode in which the mirror part is tilted and displaced around the second axis.
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公开(公告)号：EP3203298A1
公开(公告)日：2017-08-09
申请号：EP15847123.5
申请日：2015-09-29
申请人： Fujifilm Corporation
发明人： NAONO, Takayuki
IPC分类号： G02B26/08 , B81B3/00 , G02B26/10 , H01L41/09 , H01L41/113 , H01L41/187 , H02N2/00
CPC分类号： G02B26/105 , B81B3/00 , G02B26/08 , G02B26/0858 , G02B26/10 , H01L41/042 , H01L41/0933 , H01L41/0946 , H01L41/0993 , H01L41/1132 , H01L41/18 , H01L41/1876
摘要： Provided are a mirror driving device and a driving method thereof capable of improving a displacement efficiency and obtaining a sufficiently large displacement angle even in a case where a sensor part is provided. A piezoelectric actuator part 16 which generates a driving force to rotate a mirror part 12 about a rotation axis R A includes a first actuator part 30 and a second actuator part 40 having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis R A are fixed. Upper electrodes and lower electrodes of the first actuator part 30 and the second actuator part 40 are divided to correspond to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, a piezoelectric portion corresponding to positions of a first piezoelectric conversion part 81 and third piezoelectric conversion parts 103A and 103B and a piezoelectric portion corresponding to positions of second piezoelectric conversion parts 82A and 82B and a fourth piezoelectric conversion part 104 generate stresses in opposite directions.
摘要翻译： 本发明提供一种镜子驱动装置及其驱动方法，即使在设置有传感器部的情况下，也能够提高位移效率并且获得足够大的位移角。 产生使镜部12绕旋转轴线RA旋转的驱动力的压电致动器部16包括第一致动器部30和第二致动器部40，该第一致动器部30和第二致动器部40具有两端支撑梁结构， 旋转轴线RA的轴向被固定。 第一致动器部分30和第二致动器部分40的上电极和下电极被分成与谐振模式振动期间压电体中的主应力的应力分布相对应，压电部分对应于第一压电转换部分81的位置 并且与第二压电转换部分82A和82B以及第四压电转换部分104的位置对应的第三压电转换部分103A和103B以及压电部分产生相反方向的应力。
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公开(公告)号：EP3203297A1
公开(公告)日：2017-08-09
申请号：EP15846689.6
申请日：2015-09-29
申请人： Fujifilm Corporation
发明人： NAONO, Takayuki
IPC分类号： G02B26/08 , B81B3/00 , G02B26/10 , H01L41/09 , H01L41/113 , H01L41/187 , H02N2/00
CPC分类号： G02B26/105 , B81B3/0043 , B81B2201/042 , G02B26/08 , G02B26/0858 , G02B26/10 , H01L41/0933 , H01L41/0993 , H01L41/18
摘要： Provided are a mirror driving device and a driving method thereof capable of improving a displacement efficiency and obtaining a sufficiently large displacement angle even in a case where a sensor part is provided. A piezoelectric actuator part 16 which generates a driving force to rotate a mirror part 12 about a rotation axis R A includes a first actuator part 30 and a second actuator part 40 having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis R A are fixed. The first actuator part 30 has a first electrode part 51 and second electrode parts 52A and 52B. The second actuator part 40 has third electrode parts 63A and 63B and a fourth electrode part 64. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part 51 and the third electrode parts 63A and 63B and a piezoelectric portion corresponding to positions of the second electrode parts 52A and 52B and the fourth electrode part 64 generate stresses in opposite directions.
摘要翻译： 本发明提供一种镜子驱动装置及其驱动方法，即使在设置有传感器部的情况下，也能够提高位移效率并且获得足够大的位移角。 产生使镜部12绕旋转轴线RA旋转的驱动力的压电致动器部16包括第一致动器部30和第二致动器部40，该第一致动器部30和第二致动器部40具有两端支撑梁结构， 旋转轴线RA的轴向被固定。 第一致动器部分30具有第一电极部分51和第二电极部分52A和52B。 第二致动器部分40具有第三电极部分63A和63B以及第四电极部分64.构成上电极的每个电极部分的布置对应于共振模式振动期间压电体中的主应力的应力分布，以及压电 对应于第一电极部分51和第三电极部分63A和63B的位置的部分和对应于第二电极部分52A和52B以及第四电极部分64的位置的压电部分产生相反方向的应力。
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公开(公告)号：EP2398930B1
公开(公告)日：2015-06-24
申请号：EP10744283.2
申请日：2010-02-18
申请人： FUJIFILM Corporation
CPC分类号： C23C14/35 , C23C14/088 , C23C14/345 , H01J37/32651 , H01J37/3408 , H01J37/3444
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