- 专利标题: SENSOR CHIP AND ELECTRONIC DEVICE
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申请号: EP20788366.1申请日: 2020-03-16
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公开(公告)号: EP3955301A1公开(公告)日: 2022-02-16
- 发明人: YAGI, Shinichiro , OTAKE, Yusuke , ITO, Kyosuke
- 申请人: Sony Semiconductor Solutions Corporation
- 申请人地址: JP Atsugi-shi Kanagawa 243-0014 4-14-1 Asahi-cho
- 代理机构: Müller Hoffmann & Partner
- 优先权: JP2019073485 20190408
- 国际公布: WO2020209009 20201015
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; H01L31/107 ; H04N5/369
摘要:
Provided are a sensor chip and an electronic device for which the enhancement of the characteristics of SPAD pixels each including an avalanche photodiode element has been achieved. The sensor chip includes a pixel array section including a pixel area in which a plurality of pixels is arranged in rows and columns, an avalanche photodiode element that amplifies a carrier by a high electric field area provided for the each of the pixels, an inter-pixel separation section that insulates and separates the each of the pixels from another pixel adjacent to the each of the pixels in a semiconductor substrate in which the avalanche photodiode element is formed, and a wiring that is arranged in a wiring layer laminated on a surface being opposite to a light receiving surface of the semiconductor substrate in such a way as to cover at least the high electric field area. The pixel array section includes a dummy pixel area located near a peripheral edge of the pixel area, and a cathode electric potential and an anode electric potential of the avalanche photodiode element that is arranged in the dummy pixel area are a same electric potential, or at least one of the cathode electric potential and the anode electric potential is in a floating state.
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