- 专利标题: READOUT CIRCUIT FOR PIXELIZED ELECTRON DETECTOR
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申请号: EP20193504.6申请日: 2020-08-28
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公开(公告)号: EP3961268A1公开(公告)日: 2022-03-02
- 发明人: SUBHI MOHAMMED AL DISI, Mohammed , FAN, Qinwen , NIHTIANOV, Stoyan
- 申请人: ASML Netherlands B.V.
- 申请人地址: NL 5500 AH Veldhoven P.O. Box 324
- 代理机构: ASML Netherlands B.V.
- 主分类号: G01T1/17
- IPC分类号: G01T1/17
摘要:
A method of determining a number of charged particles incident on a detector within a period may include generating a first signal that is based on a charged particle impacting a sensing element of the detector, performing processing using the first signal based on a predetermined characteristic of a charged particle arrival event on the detector, and outputting a count signal based on the processing.
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