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公开(公告)号：EP4176467A1
公开(公告)日：2023-05-10
申请号：EP21742087.6
申请日：2021-07-05
IPC分类号： H01L27/144 , H01L27/146 , H01L31/115 , H01J37/12 , H01J37/153 , H01J37/244 , H01J37/28 , H01J37/317
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公开(公告)号：EP3961268A1
公开(公告)日：2022-03-02
申请号：EP20193504.6
申请日：2020-08-28
IPC分类号： G01T1/17
摘要： A method of determining a number of charged particles incident on a detector within a period may include generating a first signal that is based on a charged particle impacting a sensing element of the detector, performing processing using the first signal based on a predetermined characteristic of a charged particle arrival event on the detector, and outputting a count signal based on the processing.
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公开(公告)号：EP4390464A1
公开(公告)日：2024-06-26
申请号：EP22216582.1
申请日：2022-12-23
发明人： NIHTIANOV, Stoyan
IPC分类号： G01T1/24 , H01L31/115 , H01L31/028
CPC分类号： H01J37/04 , H01J37/12 , H01J2237/045320130101 , H01J2237/120520130101 , H01J2237/153420130101 , H01L31/115 , H01L31/028 , G01T1/242 , G01T1/244
摘要： A detector for detecting radiation is disclosed. In one arrangement, the detector has a sensing element that comprises a semiconducting sensor substrate (402) and is configured such that impingement of target radiation generates charge carriers in the sensor substrate. Readout circuitry provides an output responsive to charge carriers generated in the sensor substrate. The sensor substrate comprises a low bandgap layer (408) and a high bandgap portion (409).
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公开(公告)号：EP4020565A1
公开(公告)日：2022-06-29
申请号：EP20217152.6
申请日：2020-12-23
IPC分类号： H01L27/144 , H01L27/146 , H01L31/115 , H01J37/12 , H01J37/153 , H01J37/244 , H01J37/28 , H01J37/317
摘要： There is provided a detector substrate for use in a charged particle multi-beam assessment tool to detect charged particles from a sample. The detector substrate defines an array of apertures for the beam paths of respective charged particle beams of a multi-beam. The detector substrate comprises: a sensor unit array. A sensor unit of the sensor unit array is adjacent a corresponding aperture of the aperture array. The sensor unit is configured to capture charged particles from the sample. The detector array comprises an amplification circuit associated with each sensor unit in the sensor unit array and proximate to the corresponding aperture in the aperture array. The amplification circuit comprising a Trans Impedance Amplifier and/or an analogue to digital converter.
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公开(公告)号：EP3380894A1
公开(公告)日：2018-10-03
申请号：EP16798789.0
申请日：2016-11-23
发明人： NEEFS, Patricius Jacobus , NIHTIANOV, Stoyan , BLOKS, Ruud Hendrikus Martinus Johannes , VERMEULEN, Johannes Petrus, Martinus Bernardus , DE LA ROSETTE, Johannes Paul Marie , LAURENT, Thibault Simon Mathieu , MAKINWA, Kofi Afolabi Anthony
CPC分类号： G01B7/20 , G01K7/01 , G03F7/70625 , G03F7/7085 , G03F7/70866 , G03F7/70875 , H01L21/67248 , H01L21/67276 , H01L22/34
摘要： A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.
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