- 专利标题: TEC-EMBEDDED DUMMY DIE TO COOL THE BOTTOM DIE EDGE HOTSPOT
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申请号: EP21194501.9申请日: 2021-09-02
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公开(公告)号: EP4020546A1公开(公告)日: 2022-06-29
- 发明人: CHIU, Chia-Pin , WAN, Zhimin , LI, Peng , GOYAL, Deepak
- 申请人: INTEL Corporation
- 申请人地址: US Santa Clara, CA 95054 2200 Mission College Blvd.
- 代理机构: Goddar, Heinz J.
- 优先权: US202017131671 20201222
- 主分类号: H01L23/38
- IPC分类号: H01L23/38 ; H01L35/32
摘要:
Embodiments disclosed herein include thermoelectric cooling (TEC) dies for multichip packages. In an embodiment, a TEC die comprises a glass substrate and an array of N-type semiconductor vias and P-type semiconductor vias through the glass substrate. In an embodiment, conductive traces are over the glass substrate, and individual ones of the conductive traces connect an individual one of the N-type semiconductor vias to an individual one of the P-type semiconductor vias.
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