TEC-EMBEDDED DUMMY DIE TO COOL THE BOTTOM DIE EDGE HOTSPOT
摘要:
Embodiments disclosed herein include thermoelectric cooling (TEC) dies for multichip packages. In an embodiment, a TEC die comprises a glass substrate and an array of N-type semiconductor vias and P-type semiconductor vias through the glass substrate. In an embodiment, conductive traces are over the glass substrate, and individual ones of the conductive traces connect an individual one of the N-type semiconductor vias to an individual one of the P-type semiconductor vias.
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