发明公开
- 专利标题: ENRICHED SEMICONDUCTOR NANORIBBONS FOR PRODUCING INTRINSIC COMPRESSIVE STRAIN
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申请号: EP22200110.9申请日: 2022-10-06
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公开(公告)号: EP4181211A1公开(公告)日: 2023-05-17
- 发明人: AGRAWAL, Ashish , MURTHY, Anand , KAVALIEROS, Jack , PAUL, Rajat , DEWEY, Gilbert , SUNG, Seung Hoon , GHOSE, Susmita
- 申请人: INTEL Corporation
- 申请人地址: US Santa Clara, CA 95054 2200 Mission College Blvd.
- 代理机构: HGF
- 优先权: US202117523710 20211110
- 主分类号: H01L29/775
- IPC分类号: H01L29/775 ; H01L21/336 ; H01L29/06 ; H01L29/423 ; H01L29/10 ; H01L21/324 ; B82Y10/00 ; H01L29/165
摘要:
Techniques are provided herein to form semiconductor devices having strained channel regions. In an example, semiconductor nanoribbons of silicon germanium (SiGe) or germanium tin (GeSn) may be formed and subsequently annealed to drive the germanium or tin inwards along a portion of the semiconductor nanoribbons thus increasing the germanium or tin concentration through a central portion along the lengths of the one or more nanoribbons. Specifically, a nanoribbon may have a first region at one end of the nanoribbon having a first germanium concentration, a second region at the other end of the nanoribbon having substantially the same first germanium concentration (e.g., within 5%), and a third region between the first and second regions having a second germanium concentration higher than the first concentration. A similar material gradient may also be created using tin. The change in material composition (gradient) along the nanoribbon length imparts a compressive strain.
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