- 专利标题: MAGNETORESISTIVE ELEMENT HAVING HIGH OUT-OF-PLANE SENSITIVITY
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申请号: EP21315282.0申请日: 2021-12-17
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公开(公告)号: EP4198541A1公开(公告)日: 2023-06-21
- 发明人: Strelkov, Nikita , Timopheev, Andrey , Cuchet, Léa
- 申请人: Crocus Technology S.A.
- 申请人地址: FR 38000 Grenoble 3 Avenue Doyen Louis Weil
- 代理机构: P&TS SA (AG, Ltd.)
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; H01F10/32 ; G01R33/00
摘要:
The present disclosure concerns a magnetoresistive element comprising a reference layer (21) having a reference magnetization (210) oriented out-of-plane; a sense layer (23) having a sense magnetization (230) comprising a vortex configuration stable under the presence of an external magnetic field (60) and reversibly movable in a direction out-of-plane relative to the reference magnetization when the external magnetic field (60) varies in a direction out-of-plane; and a tunnel barrier layer (22) between the reference layer and the sense layer. The sense layer has a thickness smaller than 200 nm. The sense layer (23) comprises a ferromagnetic material configured such that the sense magnetization is between 300 and1400 emu/cm 3 and such that the sense layer (23) has a perpendicular magnetic anisotropy field that is greater than 1 kOe (79.6×10 3 A/m). The present disclosure further concerns a magnetoresistive sensor comprising a plurality of the magnetoresistive element.
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