- 专利标题: METHODS AND SYSTEMS TO DETERMINE SHAPES FOR SEMICONDUCTOR OR FLAT PANEL DISPLAY FABRICATION
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申请号: EP21883608.8申请日: 2021-10-15
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公开(公告)号: EP4205176A1公开(公告)日: 2023-07-05
- 发明人: FUJIMURA, Akira , SHIRALI, Nagesh , ORIORDAN, Donald
- 申请人: D2S, Inc.
- 申请人地址: US San Jose, CA 95117 4040 Moorpark Avenue Suite 250
- 代理机构: Appleyard Lees IP LLP
- 优先权: US202016949270 20201022
- 国际公布: WO2022086825 20220428
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L29/786 ; H01L29/82
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