- 专利标题: OPTICAL SCANNING DEVICE AND CONTROL METHOD THEREOF
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申请号: EP22214091.5申请日: 2022-12-16
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公开(公告)号: EP4209822A1公开(公告)日: 2023-07-12
- 发明人: NAONO, Takayuki
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo 106-8620 26-30, Nishiazabu 2-chome Minato-ku
- 代理机构: HGF
- 优先权: JP2022002608 20220111
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/10
摘要:
To provide an optical scanning device and a control method thereof capable of reducing power consumption required for driving and reducing a change in power consumption with a change over time.
An optical scanning device causes a mirror portion to perform a spiral rotation operation with a first driving signal applied to a first actuator and a second driving signal applied to a second actuator as cyclic voltage signals. In a case where a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a first axis, closest to a frequency of the cyclic voltage signal are respectively set as f r1 and Q 1 , a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a second axis, closest to the frequency of the cyclic voltage signal are respectively set as f r2 and Q 2 , and the frequency of the cyclic voltage signal is f d , a relationship of Q 1 ≠ Q 2 , F r2 r1 , and f r2 × (1 - 1/(1.2 × Q 2 )) ≤ f d ≤ f r1 × (1 + 1/(6 × Q 1 )) is satisfied.
An optical scanning device causes a mirror portion to perform a spiral rotation operation with a first driving signal applied to a first actuator and a second driving signal applied to a second actuator as cyclic voltage signals. In a case where a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a first axis, closest to a frequency of the cyclic voltage signal are respectively set as f r1 and Q 1 , a resonance frequency and a resonance Q value of a resonance mode, among resonance modes accompanied by mirror tilt swing around a second axis, closest to the frequency of the cyclic voltage signal are respectively set as f r2 and Q 2 , and the frequency of the cyclic voltage signal is f d , a relationship of Q 1 ≠ Q 2 , F r2 r1 , and f r2 × (1 - 1/(1.2 × Q 2 )) ≤ f d ≤ f r1 × (1 + 1/(6 × Q 1 )) is satisfied.
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