- 专利标题: SELECTIVE FILLER PATTERNING BY LITHOGRAPHY FOR OLED LIGHT EXTRACTION
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申请号: EP21898904.4申请日: 2021-11-04
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公开(公告)号: EP4252288A1公开(公告)日: 2023-10-04
- 发明人: CHEN, Chung-Chia , KWAK, Byung-Sung Leo , VISSER, Robert Jan
- 申请人: Applied Materials, Inc.
- 申请人地址: US Santa Clara, California 95054 3050 Bowers Avenue
- 代理机构: Zimmermann & Partner Patentanwälte mbB
- 优先权: US202017104188 20201125
- 国际公布: WO2022115222 20220602
- 主分类号: H01L51/56
- IPC分类号: H01L51/56 ; H01L51/52 ; H01L51/50
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