- 专利标题: MEMORY CELL WITH A FERROELECTRIC CAPACITOR INTEGRATED WITH A TRANSISTOR GATE
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申请号: EP23198055.8申请日: 2019-06-28
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公开(公告)号: EP4270396A3公开(公告)日: 2024-02-21
- 发明人: MORRIS, Daniel H. , KIM, Seiyon , AVCI, Uygar E. , YOUNG, Ian A.
- 申请人: INTEL Corporation
- 申请人地址: US Santa Clara, CA 95054 2200 Mission College Blvd.
- 代理机构: HGF
- 优先权: US201816114272 20180828
- 主分类号: G11C11/22
- IPC分类号: G11C11/22
摘要:
Described herein are ferroelectric (FE) memory cells that include transistors having gates with FE capacitors integrated therein. An example memory cell includes a transistor having a semiconductor channel material, a gate dielectric over the semiconductor material, a first conductor material over the gate dielectric, a FE material over the first conductor material, and a second conductor material over the FE material. The first and second conductor materials form, respectively, first and second capacitor electrodes of a capacitor, where the first and second capacitor electrodes are separated by the FE material (hence, a "FE capacitor"). Separating a FE material from a semiconductor channel material of a transistor with a layer of a gate dielectric and a layer of a first conductor material eliminates the FE-semiconductor interface that may cause endurance issues in some other FE memory cells.
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