发明公开
- 专利标题: FIELD EFFECT TRANSISTOR, MANUFACTURING METHOD THEREFOR, AND SWITCHING CIRCUIT
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申请号: EP22766220.2申请日: 2022-03-03
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公开(公告)号: EP4300587A1公开(公告)日: 2024-01-03
- 发明人: BAO, Qilong , JIANG, Qimeng , TANG, Gaofei , WANG, Hanxing , CURATOLA, Gilberto
- 申请人: Huawei Technologies Co., Ltd.
- 申请人地址: CN Shenzhen, Guangdong 518129 Huawei Administration Building Bantian Longgang District
- 代理机构: Huawei European IPR
- 优先权: CN202110256517 20210309
- 国际公布: WO2022188694 20220915
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/20 ; H01L21/335
摘要:
This application provides a field effect transistor, a method for preparing the field effect transistor, and a switch circuit. The field effect transistor includes a channel layer, a source, a drain, a gate structure, and a gate metal layer; and the gate structure includes a P-type gallium nitride layer and an N-type gallium nitride layer that are disposed in a stacking manner, so that a gate metal/pGaN Schottky diode is replaced with an nGaN/pGaN reverse bias diode, to improve a gate voltage-withstand capability of the field effect transistor, thereby improving a breakdown capability of the field effect transistor. A doping density of the P-type gallium nitride layer is between 1 × 10 18 cm -3 and 1 x 10 19 cm -3 , so that a charge storage effect during operation of a device can be reduced, carriers at the pGaN layer can be exhausted as much as possible, and redundant-charge storage is avoided, thereby improving operating threshold voltage stability of the device. The gate metal layer is in ohmic contact with the gate structure, so that reliability of a connection between the gate metal layer and the gate structure can be improved, thereby improving reliability of the field effect transistor.
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